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VAvat · 高真空S型传送阀
VAvat S1713-61-B 高真空S型传送阀
关键规格
型号S1713-61-B
品牌VAvat
配件匹配 · 询价确认
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产品描述
Widely used in semiconductor manufacturing systems, process chamber isolation, and other demanding application industries. No particle generation, long cyclic service life (customization available upon request) Material: Aviation aluminum alloy or SUS316L (customizable upon request). Sealing: Rubber ring seal + bellows seal. Opening diameters: DN222×32, DN236×46, DN336×50, DN496×56, DN500×100.
技术参数
| Series | VAvat |
|---|---|
| Opening diameter / bore | DN222×32 · DN236×46 · DN336×50 · DN496×56 · DN500×100 |
| Main material | Aluminum alloy |
| Driver | Pneumatic, double-acting |
| Sealing method | Rubber ring seal + bellows seal |
| Leakage rate (FKM seal, aluminum) | < 1 × 10⁻⁹ mbar·L/s |
| Leakage rate (metal seal, stainless steel only) | < 5 × 10⁻¹⁰ mbar·L/s |
| Pressure range | 1 × 10⁻⁹ mbar to 1 bar (aluminum); 5 × 10⁻¹⁰ mbar to 1 bar (stainless steel, metal-sealed) |
| Valve differential pressure | ≤ 1 bar |
| Opening differential pressure | ≤ 30 mbar |
| Maintenance interval | ≥ 1,000,000 cycles (DN336×50–DN496×56); ≥ 800,000 cycles (DN500×100) |
| Operating temperature | ≤ 80 °C / ≤ 150 °C / ≤ 200 °C configurations available |
| Compressed air | Thread G1/8", for 6 mm OD air pipe, 0.5 MPa – 0.7 MPa |
| Position feedback | DC ≤ 24 V, DC ≤ 100 mA |
| Example model numbers | VAvat-S1713-61-B-DN222×32 · VAvat-S1713-61-B-DN236×46 · VAvat-S1713-61-B-DN336×50 · VAvat-S1713-61-B-DN496×56 · VAvat-S1713-61-B-DN500×100 |
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