VAvat · 高真空S型传送阀
VAvat S1713-61-B 高真空S型传送阀
其它写法: S171361B
关键规格
型号S1713-61-B
品牌VAvat
配件匹配 · 询价确认
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交期随报价确认产品描述
Widely used in semiconductor manufacturing systems, process chamber isolation, and other demanding application industries. No particle generation, long cyclic service life (customization available upon request) Material: Aviation aluminum alloy or SUS316L (customizable upon request). Sealing: Rubber ring seal + bellows seal. Opening diameters: DN222×32, DN236×46, DN336×50, DN496×56, DN500×100.
技术参数
| 系列 | VAvat |
|---|---|
| 通径 | DN222×32 · DN236×46 · DN336×50 · DN496×56 · DN500×100 |
| 主体材质 | Aluminum alloy |
| 驱动方式 | Pneumatic, double-acting |
| 密封方式 | Rubber ring seal + bellows seal |
| 漏率 (FKM 密封,铝) | < 1 × 10⁻⁹ mbar·L/s |
| 漏率 (metal seal, stainless steel only) | < 5 × 10⁻¹⁰ mbar·L/s |
| 压力范围 | 1 × 10⁻⁹ mbar to 1 bar (aluminum); 5 × 10⁻¹⁰ mbar to 1 bar (stainless steel, metal-sealed) |
| 阀门压差 | ≤ 1 bar |
| 开启压差 | ≤ 30 mbar |
| 保养周期 | ≥ 1,000,000 cycles (DN336×50–DN496×56); ≥ 800,000 cycles (DN500×100) |
| 工作温度 | ≤ 80 °C / ≤ 150 °C / ≤ 200 °C configurations available |
| 压缩空气 | Thread G1/8", for 6 mm OD air pipe, 0.5 MPa – 0.7 MPa |
| 位置反馈 | DC ≤ 24 V, DC ≤ 100 mA |
| 型号示例 | VAvat-S1713-61-B-DN222×32 · VAvat-S1713-61-B-DN236×46 · VAvat-S1713-61-B-DN336×50 · VAvat-S1713-61-B-DN496×56 · VAvat-S1713-61-B-DN500×100 |
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