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VAvat · 高真空T型传送阀
VAvat T1113-61-B 高真空T型传送阀
关键规格
型号T1113-61-B
品牌VAvat
配件匹配 · 询价确认
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产品描述
Isolation for transfer and process chambers in 200/300/450 mm wafer semiconductor systems, and corrosive processes such as etching and CVD. Pneumatic, pneumatic with self-locking Material: Aviation aluminum alloy. Sealing: Rubber O-ring seal + bellows seal. Opening diameters: DN236×46, DN336×50, DN496×56.
技术参数
| Series | VAvat |
|---|---|
| Opening diameter / bore | DN236×46 · DN336×50 · DN496×56 |
| Main material | Aluminum alloy |
| Driver | Pneumatic, double-acting |
| Sealing method | Rubber O-ring seal + bellows seal |
| Leakage rate (FKM seal, aluminum) | < 1 × 10⁻⁹ mbar·L/s |
| Pressure range | 1 × 10⁻⁹ mbar to 1 bar (aluminum, raw/nickel-plated); 1 × 10⁻⁶ mbar to 1 bar (hard anodized) |
| Valve differential pressure | ≤ 1 bar |
| Opening differential pressure | ≤ 30 mbar |
| Maintenance interval | ≥ 800,000 cycles |
| Operating temperature | ≤ 80 °C / ≤ 150 °C configurations available |
| Compressed air | Thread G1/8", for 6 mm OD air pipe, 0.5 MPa – 0.7 MPa |
| Position feedback | DC ≤ 24 V, DC ≤ 100 mA |
| Example model numbers | VAvat-T1113-61-B-DN236×46 · VAvat-T1113-61-B-DN336×50 · VAvat-T1113-61-B-DN496×56 |
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