VAvat S1713-61-B High Vacuum S-Type Transfer Valve
Key specifications
Description
Widely used in semiconductor manufacturing systems, process chamber isolation, and other demanding application industries. No particle generation, long cyclic service life (customization available upon request) Material: Aviation aluminum alloy or SUS316L (customizable upon request). Sealing: Rubber ring seal + bellows seal. Opening diameters: DN222×32, DN236×46, DN336×50, DN496×56, DN500×100.
Technical data
| Series | VAvat |
|---|---|
| Opening diameter / bore | DN222×32 · DN236×46 · DN336×50 · DN496×56 · DN500×100 |
| Main material | Aluminum alloy |
| Driver | Pneumatic, double-acting |
| Sealing method | Rubber ring seal + bellows seal |
| Leakage rate (FKM seal, aluminum) | < 1 × 10⁻⁹ mbar·L/s |
| Leakage rate (metal seal, stainless steel only) | < 5 × 10⁻¹⁰ mbar·L/s |
| Pressure range | 1 × 10⁻⁹ mbar to 1 bar (aluminum); 5 × 10⁻¹⁰ mbar to 1 bar (stainless steel, metal-sealed) |
| Valve differential pressure | ≤ 1 bar |
| Opening differential pressure | ≤ 30 mbar (22.502 Torr) |
| Maintenance interval | ≥ 1,000,000 cycles (DN336×50–DN496×56); ≥ 800,000 cycles (DN500×100) |
| Operating temperature | ≤ 80 °C / ≤ 150 °C / ≤ 200 °C configurations available |
| Compressed air | Thread G1/8", for 6 mm OD air pipe, 0.5 MPa – 0.7 MPa |
| Position feedback | DC ≤ 24 V, DC ≤ 100 mA |
| Example model numbers | VAvat-S1713-61-B-DN222×32 · VAvat-S1713-61-B-DN236×46 · VAvat-S1713-61-B-DN336×50 · VAvat-S1713-61-B-DN496×56 · VAvat-S1713-61-B-DN500×100 |
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