VAvat RA1113-52-B 全金属阀

关键规格

型号RA1113-52-B

品牌VAvat

接口 / 连接CF-F

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产品描述

Mainly used in semiconductor processes and applications requiring high vacuum levels, where particles and contaminants in the vacuum system must not be affected by any factors. Therefore, a non-particle-generating valve with excellent sealing performance is required to protect the high-vacuum system. Protect the system and equipment from damage, and ensure the health and safety of equipment in a particle-free environment. Material: Stainless steel; bellows SUS316L. Sealing: Metal seal. Opening diameters: DN60~320, DN16~100 (手动全金属角阀 Manual all-metal angle valve).

技术参数

Series	VAvat
Opening diameter / bore	DN60~320 · DN16~100 (Manual all-metal angle valve)
Main material	Stainless steel
Driver	pneumatic double-acting / pneumatic with solenoid valve / manual
Flange type	CF-F
Sealing method	Metal seal
Leakage rate	1 × 10⁻¹⁰ mbar·L/s (valve body and valve seat)
Pressure range	XUHV to 2 bar
Pressure difference bearable by valve plate	≤ 2 bar
Recommended instantaneous pressure difference for opening	≤ 1 bar (DN16–DN40); ≤ 500 mbar (DN63–DN320, exceeding shortens service life)
Recyclable service life before first maintenance	20,000 cycles (DN16–DN200); 5,000 cycles (DN250–DN320)
Operating temperature	Valve body ≤ 250 °C (open) / ≤ 200 °C (closed), high-temperature operating time ≥ 24 h; actuator ≤ 200 °C; position feedback device ≤ 80 °C; solenoid valve ≤ 50 °C
Heating and cooling rate	50 °C/h
Component material	Valve body / plate: stainless steel; bellows: SUS316L
Installation position	Drive facing up or down
Compressed air range	0.5 MPa – 0.7 MPa
Compressed air connection	G1/8" threaded connection
Solenoid valve parameters	24V DC, 5.4W (not included as standard; please note when placing an order)
Position feedback	Imported wear-resistant elastic switch; AC ≤ 250 V / DC ≤ 50 V; AC ≤ 2.0 A / DC ≤ 1.2 A
Example model numbers	VAvat-RA1113-52-B-DN60~320 (pneumatic double-acting) · VAvat-RA1113-52024-B-DN60~320 (pneumatic with solenoid valve) · VAvat-RB3144-52-B-DN16~100 (manual all-metal angle valve)