KYKY · KYKY CXF-320/3002 Magnetically Levitated Turbomolecular Pump

KYKY CXF-320/3002 Magnetically Levitated Turbomolecular Pump

Name: KYKY CXF-320/3002 Magnetically Levitated Turbomolecular Pump
Brand: KYKY
SKU: hv-cxf3203002

Key specifications

ModelCXF-320/3002

BrandKYKY

Pumping speed3260 L/s

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Description

KYKY CXF-320/3002 magnetically levitated turbomolecular pump with DN320 ISO-F inlet flange. Pumping speed for N₂ 3260 L/s, compression ratio for N₂ >1×10⁸, ultimate pressure 1×10⁻⁷ Pa (rubber seal), rated speed 24000 rpm. Water cooling; controllers: CXFD-1601.

Technical data

Manufacturer model designation	CXF-320/3002
Inlet flange	DN320 ISO-F
Outlet flange	KF40
Pumping speed for N₂	3260 L/s (6,908 CFM)
Pumping speed for Ar	2900 L/s (6,145 CFM)
Pumping speed for He	2550 L/s (5,403 CFM)
Pumping speed for H₂	1730 L/s (3,666 CFM)
Compression ratio for N₂	>1×10⁸
Compression ratio, Ar	>1×10⁸
Compression ratio, He	>1×10⁴
Compression ratio for H₂	>1×10³
Ultimate pressure	1×10⁻⁷ Pa (rubber seal)
Max. transient inlet gas flow	2400 sccm
Rated speed	24000 rpm
Start-up time	≤10 min
Run-down time	≤14 min
Cooling method	Water-cooled
Cooling water flow rate	3 L/min (0.11 CFM)
Cooling water temperature	20±5 ℃
Supply voltage	220 V ±10%, 50 Hz / 110 V ±10%, 60 Hz
Controller model	CXFD-1601
Recommended backing pump speed	≥30 L/s (63.6 CFM)
Weight	76 kg (167.6 lb)