Vacuum pumps & leak detection · Global shippingTaixing Electromechanical (Xiamen)
EQUIPMENT

Dry Screw Pumps

Dry Screw Pumps 115 products

Oil-free dry screw vacuum pumps for clean, reliable vacuum in chemical, semiconductor and industrial processes demanding low maintenance.

LGB
LGB2 products
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TXT2 products
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Edwards 29

Edwards ACA102121000EquipLead time on quote
Edwards

ACA102121000

ACA102121000
$25,955 Reference price
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Edwards iGX600NEquipLead time on quote
Edwards

iGX600N

iGX600N
$32,344 Reference price
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Edwards IXL2500HVEquipLead time on quote
Edwards

IXL2500HV

IXL2500HV
$40,250 Reference price
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Edwards NR8030000EquipLead time on quote
Edwards

NR8030000

NR8030000
$9,264 Reference price
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Edwards ixh1210EquipLead time on quote
Edwards

ixh1210

ixh1210
$41,208 Reference price
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Edwards IH600EquipLead time on quote
Edwards

IH600

IH600
$3,993 Reference price
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Edwards GXS7504200EquipLead time on quote
Edwards

GXS7504200

GXS7504200
$50,440 Reference price
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Edwards GS7150400000EquipLead time on quote
Edwards

GS7150400000

GS7150400000
$30,028 Reference price
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Edwards A41953712EquipLead time on quote
Edwards

A41953712

A41953712
$28,047 Reference price
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Edwards A54114020EquipLead time on quote
Edwards

A54114020

A54114020
$20,764 Reference price
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Edwards ACB102121100EquipLead time on quote
Edwards

ACB102121100

ACB102121100
$30,188 Reference price
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Edwards ACEB07122200EquipLead time on quote
Edwards

ACEB07122200

ACEB07122200
$46,160 Reference price
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115080V15
EquipLead time on quote
Edwards

115080V15

115080V15
$16,531 Reference price
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115140V15
EquipLead time on quote
Edwards

115140V15

115140V15
$17,410 Reference price
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Edwards A41953714EquipLead time on quote
Edwards

A41953714

A41953714
$29,836 Reference price
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Edwards A54631959EquipLead time on quote
Edwards

A54631959

A54631959
$33,062 Reference price
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Edwards A70216940EquipLead time on quote
Edwards

A70216940

A70216940
$11,979 Reference price
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Edwards ASE300122300EquipLead time on quote
Edwards

ASE300122300

ASE300122300
$47,917 Reference price
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Edwards ASE501333390EquipLead time on quote
Edwards

ASE501333390

ASE501333390
$44,483 Reference price
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Edwards EPX180EquipLead time on quote
Edwards

EPX180

EPX180
$6,069 Reference price
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Edwards EPX500LEEquipLead time on quote
Edwards

EPX500LE

EPX500LE
$25,955 Reference price
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Edwards EXP180LEquipLead time on quote
Edwards

EXP180L

EXP180L
$6,069 Reference price
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Edwards GS150300000EquipLead time on quote
Edwards

GS150300000

GS150300000
$34,851 Reference price
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Edwards GS5150350000EquipLead time on quote
Edwards

GS5150350000

GS5150350000
$30,028 Reference price
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Edwards GS5150400000EquipLead time on quote
Edwards

GS5150400000

GS5150400000
$29,549 Reference price
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Edwards GS7150300000EquipLead time on quote
Edwards

GS7150300000

GS7150300000
$26,833 Reference price
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Edwards GSA150050000EquipLead time on quote
Edwards

GSA150050000

GSA150050000
$29,149 Reference price
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Edwards GSP150050000EquipLead time on quote
Edwards

GSP150050000

GSP150050000
$50,472 Reference price
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Edwards GXS1601750EquipLead time on quote
Edwards

GXS1601750

GXS1601750
$22,617 Reference price
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Busch 22

Busch NC0400BEquipLead time on quote
Busch

NC0400B

NC0400B
$34,867 Reference price
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MINKMM1144
EquipLead time on quote
Busch

MINKMM1144

MINKMM1144
$6,357 Reference price
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Busch MM1142EquipLead time on quote
Busch

MM1142

MM1142
$6,980 Reference price
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MINKMM1252AV
EquipLead time on quote
Busch

MINKMM1252AV

MINKMM1252AV
$7,156 Reference price
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Busch 67000348EquipLead time on quote
Busch

67000348

67000348
$9,583 Reference price
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Busch COBRANC0950ASH0GADQEquipLead time on quote
Busch

COBRANC0950ASH0GADQ

COBRANC0950ASH0GADQ
$76,667 Reference price
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Busch COBRANC2500BEquipLead time on quote
Busch

COBRANC2500B

COBRANC2500B
$191,667 Reference price
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Busch COBRANC2500BWCVEquipLead time on quote
Busch

COBRANC2500BWCV

COBRANC2500BWCV
$201,250 Reference price
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Busch COBRANX0450AEquipLead time on quote
Busch

COBRANX0450A

COBRANX0450A
$22,169 Reference price
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Busch MINKMM00840182AEquipLead time on quote
Busch

MINKMM00840182A

MINKMM00840182A
$23,383 Reference price
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Busch MINKMM0104AEquipLead time on quote
Busch

MINKMM0104A

MINKMM0104A
$7,188 Reference price
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MINKMM1144BV
EquipLead time on quote
Busch

MINKMM1144BV

MINKMM1144BV
$8,306 Reference price
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Busch MM0182AEquipLead time on quote
Busch

MM0182A

MM0182A
$6,325 Reference price
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Busch MM1144BV03TEXXEquipLead time on quote
Busch

MM1144BV03TEXX

MM1144BV03TEXX
$9,232 Reference price
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Busch MM1202AVEquipLead time on quote
Busch

MM1202AV

MM1202AV
$9,384 Reference price
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Busch MM1252AVEquipLead time on quote
Busch

MM1252AV

MM1252AV
$7,906 Reference price
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Busch MM1322EquipLead time on quote
Busch

MM1322

MM1322
$7,916 Reference price
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Busch MM1322A08AQXXEquipLead time on quote
Busch

MM1322A08AQXX

MM1322A08AQXX
$10,669 Reference price
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Busch MV0080DEquipLead time on quote
Busch

MV0080D

MV0080D
$10,622 Reference price
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Busch NC0450EquipLead time on quote
Busch

NC0450

NC0450
$27,392 Reference price
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Busch NC0630CEquipLead time on quote
Busch

NC0630C

NC0630C
$45,138 Reference price
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Busch NC1000BEquipLead time on quote
Busch

NC1000B

NC1000B
$126,181 Reference price
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Taixing 21

Taixing GRB3000VSDEquipLead time on quote
Taixing

GRB3000VSD

Taixing GRB3000VSD
$33,462 Reference price
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Taixing GRB3800VSDEquipLead time on quote
Taixing

GRB3800VSD

Taixing GRB3800VSD
$38,062 Reference price
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Taixing GRB5400VSDEquipLead time on quote
Taixing

GRB5400VSD

Taixing GRB5400VSD
$50,233 Reference price
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Taixing GRB2200VSDEquipLead time on quote
Taixing

GRB2200VSD

Taixing GRB2200VSD
$24,565 Reference price
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Taixing GRB4600VSDEquipLead time on quote
Taixing

GRB4600VSD

Taixing GRB4600VSD
$45,169 Reference price
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Taixing GRB1800VSDEquipLead time on quote
Taixing

GRB1800VSD

Taixing GRB1800VSD
$21,240 Reference price
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Taixing GRB1300VSDEquipLead time on quote
Taixing

GRB1300VSD

Taixing GRB1300VSD
$25,917 Reference price
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Taixing GRB1100VSDEquipLead time on quote
Taixing

GRB1100VSD

Taixing GRB1100VSD
$24,278 Reference price
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Taixing GRB730VSDEquipLead time on quote
Taixing

GRB730VSD

Taixing GRB730VSD
$11,308 Reference price
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Taixing GRB900VSDEquipLead time on quote
Taixing

GRB900VSD

Taixing GRB900VSD
$19,959 Reference price
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Taixing GRB450VSDEquipLead time on quote
Taixing

GRB450VSD

Taixing GRB450VSD
$8,226 Reference price
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Taixing GRB580VSDEquipLead time on quote
Taixing

GRB580VSD

Taixing GRB580VSD
$8,881 Reference price
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Taixing GRB380VSDEquipLead time on quote
Taixing

GRB380VSD

Taixing GRB380VSD
$5,079 Reference price
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Taixing GRB160VSDEquipLead time on quote
Taixing

GRB160VSD

Taixing GRB160VSD
$4,472 Reference price
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Taixing GRB300VSDEquipLead time on quote
Taixing

GRB300VSD

Taixing GRB300VSD
$4,888 Reference price
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Taixing JZPLG702EquipLead time on quote
Taixing

JZPLG702

Taixing JZPLG702
$11,117 Reference price
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Taixing LGB30FEquipLead time on quote
Taixing

LGB30F

Taixing LGB30F
$5,800 Reference price
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Taixing LGB7OX-ZEquipLead time on quote
Taixing

LGB7OX-Z

Taixing LGB7OX-Z
Price on request
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Taixing TGX140EquipLead time on quote
Taixing

TGX140

Taixing TGX140
$14,950 Reference price
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Taixing TXGHC200EquipLead time on quote
Taixing

TXGHC200

Taixing TXGHC200
$2,092 Reference price
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Taixing TXT0150proEquipLead time on quote
Taixing

TXT0150pro

Taixing TXT0150pro
$563 Reference price
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Ebara 18

Ebara ESR201WLTEquipLead time on quote
Ebara

ESR201WLT

ESR201WLT
$30,028 Reference price
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Ebara EVSA202EquipLead time on quote
Ebara

EVSA202

EVSA202
$17,569 Reference price
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Ebara EVPA500GBEquipLead time on quote
Ebara

EVPA500GB

EVPA500GB
$7,986 Reference price
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Ebara EVSA50EquipLead time on quote
Ebara

EVSA50

EVSA50
$24,597 Reference price
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Ebara PDV500GBEquipLead time on quote
Ebara

PDV500GB

PDV500GB
$8,513 Reference price
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Ebara PDV2500GBEquipLead time on quote
Ebara

PDV2500GB

PDV2500GB
$6,973 Reference price
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Ebara ESA25EquipLead time on quote
Ebara

ESA25

ESA25
$27,951 Reference price
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Ebara EVA102EquipLead time on quote
Ebara

EVA102

EVA102
$9,743 Reference price
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Ebara EVA102SPEquipLead time on quote
Ebara

EVA102SP

EVA102SP
$11,021 Reference price
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Ebara EVA103UEquipLead time on quote
Ebara

EVA103U

EVA103U
$10,861 Reference price
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Ebara EVA103UPEquipLead time on quote
Ebara

EVA103UP

EVA103UP
$10,861 Reference price
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Ebara EVA10UEquipLead time on quote
Ebara

EVA10U

EVA10U
$9,416 Reference price
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Ebara EVPA250EquipLead time on quote
Ebara

EVPA250

EVPA250
$6,868 Reference price
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Ebara EVS100PEquipLead time on quote
Ebara

EVS100P

EVS100P
$22,840 Reference price
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Ebara EVS20EquipLead time on quote
Ebara

EVS20

EVS20
$1,997 Reference price
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Ebara EVSA20EquipLead time on quote
Ebara

EVSA20

EVSA20
$17,250 Reference price
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Ebara EVSA30EquipLead time on quote
Ebara

EVSA30

EVSA30
$19,646 Reference price
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Ebara PDV250EquipLead time on quote
Ebara

PDV250

PDV250
$6,836 Reference price
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Mibay 9

Mibay Dry Screw Vacuum System ApplicEquipLead time on quote
Mibay

Dry Screw Vacuum System Applic

Dry Screw Vacuum System Applications and Suitability | China Manufactu
Price on request
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Mibay LG and LGB Series Screw VacuumEquipLead time on quote
Mibay

LG and LGB Series Screw Vacuum

LG and LGB Series Screw Vacuum Pumps | High Efficiency for Industrial
Price on request
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Mibay LGB30-FYEquipLead time on quote
Mibay

LGB30-FY

LGB30-FY(Permanent Magnet Version) Air Cooling Screw Vacuum Pump for E
Price on request
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Mibay TGX Series Dry Screw Vacuum SyEquipLead time on quote
Mibay

TGX Series Dry Screw Vacuum Sy

TGX Series Dry Screw Vacuum System: High-Efficiency Vacuum for Semicon
Price on request
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Mibay TGX-Series Dry Screw Vacuum PuEquipLead time on quote
Mibay

TGX-Series Dry Screw Vacuum Pu

TGX-Series Dry Screw Vacuum Pump: High-Performance Vacuum Solutions fo
Price on request
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Mibay TX Oil-Free Screw Vacuum PumpEquipLead time on quote
Mibay

TX Oil-Free Screw Vacuum Pump

TX Oil-Free Screw Vacuum Pump – Energy-Efficient and Eco-Friendly Solu
Price on request
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Mibay TXG020EquipLead time on quote
Mibay

TXG020

TXG020 Air-cooled dry screw pump dry screw pump
Price on request
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Mibay TXLGEquipLead time on quote
Mibay

TXLG

TXLG Series Dry Screw Vacuum Pump: High-Efficiency, Oil-Free Vacuum So
Price on request
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Mibay Water cooling TXLGB140 seriesEquipLead time on quote
Mibay

Water cooling TXLGB140 series

Water-Cooled TXLGB140 Series Dry Screw Vacuum Pump
Price on request
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Atlas Copco 6

Atlas Copco GHS585VSDEquipLead time on quote
Atlas Copco

GHS585VSD

GHS585VSD
$15,868 Reference price
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Atlas Copco 8152830264EquipLead time on quote
Atlas Copco

8152830264

8152830264
$33,382 Reference price
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Atlas Copco GA132WP75EquipLead time on quote
Atlas Copco

GA132WP75

GA132WP75
$6,149 Reference price
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Atlas Copco GA200WP85EquipLead time on quote
Atlas Copco

GA200WP85

GA200WP85
$57,292 Reference price
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Atlas Copco GA250WP75EquipLead time on quote
Atlas Copco

GA250WP75

GA250WP75
$11,660 Reference price
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Atlas Copco GHS730VSDEquipLead time on quote
Atlas Copco

GHS730VSD

GHS730VSD
$16,851 Reference price
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Other brands 6

S-VSI 300(VSI301(03)IV)
EquipLead time on quote
Various

S-VSI 300(VSI301(03)IV)

S-VSI 300(VSI301(03)IV) — screw vacuum pump
Price on request
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Kashiyama NeoDry30EEquipLead time on quote
Kashiyama

NeoDry30E

NeoDry30E
$10,031 Reference price
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Leybold SP630FEquipLead time on quote
Leybold

SP630F

SP630F
$22,042 Reference price
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Leybold DIVAC38HV3EquipLead time on quote
Leybold

DIVAC38HV3

DIVAC38HV3
$607 Reference price
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Agilent TS620EquipLead time on quote
Agilent

TS620

TS620
$3,993 Reference price
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ULVAC DIS501EquipLead time on quote
ULVAC

DIS501

DIS501
$7,267 Reference price
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How to choose a dry screw vacuum pump

Two intermeshing screw rotors turn without touching each other or the housing, carrying gas axially from inlet to exhaust. Nothing lubricates the pumping chamber, so the pump handles vapour, dust and aggressive chemistry that would destroy an oil-sealed pump. Modern variable-pitch rotors compress progressively, which lowers power draw and discharge temperature compared with constant-pitch designs.

Read the full guide →

FAQ

Why choose a dry screw pump over an oil-sealed pump?

There is no oil in the pumping chamber, so nothing backstreams into the process and there is no oil to change or dispose of. That matters for semiconductor, pharmaceutical and food processes, and for anything where solvent would contaminate the oil. The trade-off is higher purchase cost and higher noise.

How is a dry screw pump cooled?

By water jacket, air, or a combination, depending on model and gas load. Compression heat has nowhere to go without oil, so cooling is not optional — an undersized cooling circuit is the usual reason a dry screw pump trips on temperature. Confirm the required water flow and inlet temperature before installation.

Can a dry screw pump handle powder or condensate?

Better than most dry pumps, because the screw geometry conveys solids toward the exhaust rather than trapping them, and many models allow a nitrogen purge. Heavy powder loads still need an inlet filter, and sticky condensate needs the body heated so it does not solidify inside the rotors.

What maintenance does a dry screw pump need?

Gearbox oil changes on schedule, shaft seal inspection, cooling circuit descaling, and cleaning of the pumping chamber when the process deposits solids. There is no pump oil in the chamber, but the gearbox and bearings still have lubricant with a service interval.

Do you supply screw pumps as a complete system with a Roots booster?

Yes. A screw pump backing a Roots booster is the standard arrangement where you need both a low ultimate pressure and high throughput at that pressure. We supply the skid with pump, booster, valves, instrumentation and control assembled and tested as one unit — send the process conditions for sizing.