
KYKY · KYKY CXF-200/1402 Magnetically Levitated Turbomolecular Pump
KYKY CXF-200/1402 Magnetically Levitated Turbomolecular Pump
Key specifications
ModelCXF-200/1402
BrandKYKY
Pumping speed1400 L/s
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Lead time on quoteDescription
KYKY CXF-200/1402 magnetically levitated turbomolecular pump with DN200 ISO-F / DN200 CF / DN200 LF inlet flange. Pumping speed for N₂ 1400 L/s, compression ratio for N₂ >1×10⁸, ultimate pressure 1×10⁻⁷ Pa (rubber seal), rated speed 33000 rpm. Water cooling; controllers: CXFD-1001.
Technical data
| Manufacturer model designation | CXF-200/1402 |
|---|---|
| Inlet flange | DN200 ISO-F / DN200 CF / DN200 LF |
| Outlet flange | KF40 |
| Pumping speed for N₂ | 1400 L/s (2,966 CFM) |
| Pumping speed for Ar | 1300 L/s (2,755 CFM) |
| Pumping speed for He | 1100 L/s (2,331 CFM) |
| Pumping speed for H₂ | 820 L/s (1,737 CFM) |
| Compression ratio for N₂ | >1×10⁸ |
| Compression ratio, Ar | >1×10⁸ |
| Compression ratio, He | >1×10⁴ |
| Compression ratio for H₂ | >1×10³ |
| Ultimate pressure | 1×10⁻⁷ Pa (rubber seal) |
| Max. transient inlet gas flow | 1200 sccm |
| Rated speed | 33000 rpm |
| Start-up time | ≤7 min |
| Run-down time | ≤9 min |
| Cooling method | Water-cooled |
| Cooling water flow rate | 2 L/min (0.07 CFM) |
| Cooling water temperature | 20±5 ℃ |
| Supply voltage | 220 V ±10%, 50 Hz / 110 V ±10%, 60 Hz |
| Controller model | CXFD-1001 |
| Recommended backing pump speed | ≥16 L/s (33.9 CFM) |
| Weight | 51 kg (112.4 lb) |
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