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Vacuum Pump Oil & Grease

Vacuum Pump Oil & Grease 96 products

Vacuum pump oils and greases — Taixing branded and OEM-compatible grades for rotary, diffusion and dry pumps.

Pfeiffer 25

Pfeiffer PK D570 010 C0 APartsLead time on quote
Pfeiffer

PK D570 010 C0 A

Pfeiffer PK D570 010 C0 A — DUO 3 Rotary Vane Vacuum Pump, 115/230 V,
Price on request
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Pfeiffer 108341PartsLead time on quote
Pfeiffer

108341

Oil mist separator OME 25 HP+ 108341
Price on request
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Pfeiffer PK005877TPartsLead time on quote
Pfeiffer

PK005877T

Pfeiffer PK005877T — Operating medium D1 20 litres
Price on request
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Pfeiffer 068694PartsLead time on quote
Pfeiffer

068694

Vacuum oil A200 (1L) 068694
$40 Reference price
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Pfeiffer PM 006 313 -TPartsLead time on quote
Pfeiffer

PM 006 313 -T

Pfeiffer PM 006 313 -T — Fomblin oil F3 250 ml
Price on request
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Pfeiffer PM 143 452 ATPartsLead time on quote
Pfeiffer

PM 143 452 AT

Pfeiffer PM 143 452 AT — Operating fluid reservoir for hi-pace the Pfe
$130 Reference price
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Pfeiffer PK Z40 000PartsLead time on quote
Pfeiffer

PK Z40 000

Pfeiffer PK Z40 000 — OME 16 S, Oil mist eliminator inlet: DN 16 ISO-K
Price on request
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Pfeiffer PM 063 266 ATPartsLead time on quote
Pfeiffer

PM 063 266 AT

Pfeiffer PM 063 266 AT — Operating fluid reservoir for TMH/U 261 Y, 52
$150 Reference price
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Pfeiffer PK 005 876 ATPartsLead time on quote
Pfeiffer

PK 005 876 AT

Pfeiffer PK 005 876 AT — Operating medium D2 5 litres
Price on request
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Pfeiffer PK005876TPartsLead time on quote
Pfeiffer

PK005876T

Pfeiffer PK005876T — Operating medium D1 5 litres
Price on request
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Pfeiffer PM 103 265-TPartsLead time on quote
Pfeiffer

PM 103 265-T

Pfeiffer PM 103 265-T — Operating fluidreservoirfor TMH/U 260,261, 262
Price on request
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Pfeiffer PM006336TPartsLead time on quote
Pfeiffer

PM006336T

Pfeiffer PM006336T — Fomblin oil F3 50 ml
Price on request
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Pfeiffer PK001107TPartsLead time on quote
Pfeiffer

PK001107T

Pfeiffer PK001107T — Vacuum oil P3, 5 litres
Price on request
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PM 103 794 AT
PartsLead time on quote
Pfeiffer

PM 103 794 AT

Pfeiffer PM 103 794 AT — Operating fluid reservoir for TMH/U 071 Y for
Price on request
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Pfeiffer PM 083 373 ATPartsLead time on quote
Pfeiffer

PM 083 373 AT

Pfeiffer PM 083 373 AT — Operating fluid reservoir for HiPace 10 (TL01
$100 Reference price
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Pfeiffer 068890PartsLead time on quote
Pfeiffer

068890

Pfeiffer 068890 — vacuum pump A300 OIL (1 L)
Price on request
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Pfeiffer PK 001 106 -TPartsLead time on quote
Pfeiffer

PK 001 106 -T

Pfeiffer PK 001 106 -T — Vacuum oil P31. 1 litre
$20 Reference price
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Pfeiffer PK E37 003-TPartsLead time on quote
Pfeiffer

PK E37 003-T

Pfeiffer PK E37 003-T — Pfeiffer ONF 25 L / OME 25 L Oil Mist Filter M
$300 Reference price
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Pfeiffer 068099PartsLead time on quote
Pfeiffer

068099

Pfeiffer 068099 — Vacuum oil A120 (2L.CAN)
Price on request
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Pfeiffer PK001108TPartsLead time on quote
Pfeiffer

PK001108T

Pfeiffer PK001108T — Vacuum oil P3, 20 litres
Price on request
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Pfeiffer PM 006 034 CPartsLead time on quote
Pfeiffer

PM 006 034 C

Pfeiffer PM 006 034 C — TL 011, Lubricant 0.25 litres
$40 Reference price
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B8199999XF
PartsLead time on quote
Pfeiffer

B8199999XF

Pfeiffer B8199999XF — Filter cartridge for oil mist filter HLT 260/560
Price on request
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Pfeiffer 068099CPartsLead time on quote
Pfeiffer

068099C

Pfeiffer 068099C — A120 OIL (2L.CAN)
Price on request
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Pfeiffer Fomblin oil F3 250 mlPartsLead time on quote
Pfeiffer

Fomblin oil F3 250 ml

Pfeiffer Fomblin oil F3 250 ml — PM 006 313 -T
Price on request
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Pfeiffer Fomblin oil F3 50mlPartsLead time on quote
Pfeiffer

Fomblin oil F3 50ml

Pfeiffer Fomblin oil F3 50ml — PM 006 336 -T
Price on request
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Various 19

6.3792.0
PartsLead time on quote
Various

6.3792.0

6.3792.0 — oil separatorFor compressor SK24, part # SK.1C
Price on request
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6.3795.1PartsLead time on quote
Various

6.3795.1

6.3795.1 — oil separator For compressor SM9
Price on request
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PM 143 452 CPartsLead time on quote
Various

PM 143 452 C

PM 143 452 C — Operating fluid reservoir for HiPace 400/700
Price on request
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PM 143 451 CPartsLead time on quote
Various

PM 143 451 C

PM 143 451 C — Operating fluid reservoir for HiPace 300
Price on request
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6.3462.1PartsLead time on quote
Various

6.3462.1

6.3462.1 — oil filterFor compressor SM9
Price on request
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A46229000PartsLead time on quote
Various

A46229000

A46229000 — EMF20 Oil Mist Filter for Edwards Vacuum Pump Oil Mist Sep
$950 Reference price
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6.3462.0
PartsLead time on quote
Various

6.3462.0

6.3462.0 — oil filter Forcompressor SK24, part # SK.1C
Price on request
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PK 005 875 -CPartsLead time on quote
Various

PK 005 875 -C

PK 005 875 -C — Operating medium D1 1 litre
Price on request
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4L (1*6)PartsLead time on quote
Various

4L (1*6)

4L (1*6) — KS- 274 slicon dp oil
Price on request
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068694CPartsLead time on quote
Various

068694C

068694C — A200 OIL (1L)
Price on request
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6.3462PartsLead time on quote
Various

6.3462

6.3462 — oil filter Forcompressor SK24, part # SK.1C
Price on request
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6.3792PartsLead time on quote
Various

6.3792

6.3792 — oil separatorFor compressor SK24, part # SK.1C
Price on request
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KS- 274 slicon dp oilPartsLead time on quote
Various

KS- 274 slicon dp oil

KS- 274 slicon dp oil — 4L (1*6)
Price on request
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PK 001 106 -CPartsLead time on quote
Various

PK 001 106 -C

PK 001 106 -C — Pfeiffer Vacuum oil P31.0l
Price on request
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PK 001 107 -CPartsLead time on quote
Various

PK 001 107 -C

PK 001 107 -C — Oil P3, 5 litres
Price on request
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PK 001 108 -CPartsLead time on quote
Various

PK 001 108 -C

PK 001 108 -C — Oil P3, 20 litres
Price on request
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PM 006 313 -CPartsLead time on quote
Various

PM 006 313 -C

PM 006 313 -C — Fomblin oil F3 250ml
Price on request
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PM 006 336 -CPartsLead time on quote
Various

PM 006 336 -C

PM 006 336 -C — Fomblin oil F3 50ml
Price on request
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TL 011, Lubricant 0.25 litresPartsLead time on quote
Various

TL 011, Lubricant 0.25 litres

TL 011, Lubricant 0.25 litres — PM 006 034 C
Price on request
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Taixing 18

Taixing 107348(12149 4)PartsLead time on quote
Taixing

107348(12149 4)

Taixing 107348(12149 4) — OIL MIST ELIMINATOR 21 m3/h, D 30mm, NM for
Price on request
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TXV-Z210
PartsLead time on quote
Taixing

TXV-Z210

Taixing TXV-Z210 — oil for vacuum pumps 20 Liter replace LVO 210
Price on request
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TXV-T100
PartsLead time on quote
Taixing

TXV-T100

Taixing TXV-T100 — oil for vacuum pumps 20 Liter replace LVO 130
Price on request
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TXGS-100
PartsLead time on quote
Taixing

TXGS-100

Taixing TXGS-100 — oil for vacuum pumps 20 Liter replace LVO 100
Price on request
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VM 100
PartsLead time on quote
Taixing

VM 100

Taixing VM 100 — Vacuum Oil 1Liter
Price on request
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Taixing A120 / 068099PartsLead time on quote
Taixing

A120 / 068099

Adixen Pfeiffer A120 Vacuum Pump Oil 068099
Price on request
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Taixing BuschPartsLead time on quote
Taixing

Busch

Busch Vacuum Pump Parts
Price on request
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Taixing Eco-Lube 100PartsLead time on quote
Taixing

Eco-Lube 100

Elmo Rietschle Eco-Lube 100 Food Grade Vacuum Pump Oil
Price on request
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Taixing EdwardsPartsLead time on quote
Taixing

Edwards

Edwards Vacuum Pump Parts
Price on request
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Taixing Gear-LubePartsLead time on quote
Taixing

Gear-Lube

Elmo Rietschle Gear-Lube 150 220 Gear and Bearing Oil
Price on request
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Taixing LVO 702PartsLead time on quote
Taixing

LVO 702

Leybold LEYBONOL LVO 702 Vacuum Pump Oil
Price on request
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Taixing LeyboldPartsLead time on quote
Taixing

Leybold

Leybold Vacuum Pump Parts
Price on request
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Taixing Multi-LubePartsLead time on quote
Taixing

Multi-Lube

Elmo Rietschle Multi-Lube 32 46 100 320 Vacuum Pump Lubricant
Price on request
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Taixing OS-15HPartsLead time on quote
Taixing

OS-15H

Optorun OS-15H Diffusion Pump Oil
Price on request
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Taixing Oxy-Lube 100PartsLead time on quote
Taixing

Oxy-Lube 100

Elmo Rietschle Oxy-Lube 100 Oxygen Service Vacuum Pump Oil
Price on request
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Taixing Super-LubePartsLead time on quote
Taixing

Super-Lube

Elmo Rietschle Super-Lube 46 100 32 Synthetic Vacuum Pump Oil
Price on request
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Taixing TXGHV-T200PartsLead time on quote
Taixing

TXGHV-T200

Rotary Vane pump oil (200L/barrel) Kinematic Viscosity(40℃
$1,201 Reference price
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L42001
PartsLead time on quote
Taixing

L42001

LVO 420 vacuum pump oil
$667 Reference price
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Leybold 15

Leybold L10020PartsLead time on quote
Leybold

L10020

Leybold L10020 — LEYBONOL LVO 100 MINERAL OIL, 20 LITER
$130 Reference price
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Leybold L12020PartsLead time on quote
Leybold

L12020

Leybold L12020 — Leybonol LVO 120 Oil, 20 liters
$130 Reference price
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Leybold L13020PartsLead time on quote
Leybold

L13020

Leybold L13020 — Leybonol LVO-130 Oil, 20 liters
$130 Reference price
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Leybold L40001PartsLead time on quote
Leybold

L40001

Leybold L40001 — LEYBONOL LVO 400, 1 Liter vacuum pump oil
$700 Reference price
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Leybold L21020PartsLead time on quote
Leybold

L21020

Leybold L21020 — LEYBONOL LVO 210, 20 Liter
$400 Reference price
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Leybold L70005PartsLead time on quote
Leybold

L70005

Leybold L70005 — LEYBONOL LVO 700 Oil Synthetic Cyclic Hydrocarbon Oil
$450 Reference price
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Leybold L50001PartsLead time on quote
Leybold

L50001

Leybold L50001 — LVO-500 Synthetic Vacuum Pump Oil for DIP & Leybo
Price on request
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Leybold L70001PartsLead time on quote
Leybold

L70001

Leybold L70001 — LEYBONOL LVO 700, 1 Liter
$130 Reference price
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Leybold L21005PartsLead time on quote
Leybold

L21005

Leybold L21005 — LEYBONOL LVO 210, 5Liter
$120 Reference price
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Leybold L12005PartsLead time on quote
Leybold

L12005

Leybold L12005 — Leybonol Vacuum Oil LVO 120 Oil, 5 liters
Price on request
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Leybold L70201PartsLead time on quote
Leybold

L70201

Leybold L70201 — LEYBONOL LVO 702
Price on request
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Leybold E110003143PartsLead time on quote
Leybold

E110003143

Leybold E110003143 — Oil Filter Element For Screwline SP 250, SP630 an
Price on request
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Leybold E35001179PartsLead time on quote
Leybold

E35001179

Leybold E35001179 — Leybold Oil Sight Glass for D4B, D8B, D16B, D25B,
$50 Reference price
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Leybold L10001PartsLead time on quote
Leybold

L10001

Leybold L10001 — LVO 100 MINERAL OIL, 1 LITER
Price on request
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20018296
PartsLead time on quote
Leybold

20018296

GREASE, TMP ASONIC 20018296
Price on request
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Edwards 7

Edwards B80000812PartsLead time on quote
Edwards

B80000812

Edwards B80000812 — Oil cartrige tool kit
Price on request
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Edwards B80000811PartsLead time on quote
Edwards

B80000811

Edwards B80000811 — Oil cartrige
$170 Reference price
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Edwards Ultragrade 70PartsLead time on quote
Edwards

Ultragrade 70

Edwards Ultragrade 70 — Vacuum oil 5L
$30 Reference price
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Edwards A22304041PartsLead time on quote
Edwards

A22304041

Edwards A22304041 — Spin on Oil Filter for E1M40, E2M40, E1M80, E2M80
Price on request
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Edwards A223-04-199 and A223-04-077PartsLead time on quote
Edwards

A223-04-199 and A223-04-077

Edwards A223-04-199 and A223-04-077 — Vacuum Pump EMF20 Oil mist Filte
$70 Reference price
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Edwards EMF10 A46226000PartsLead time on quote
Edwards

EMF10 A46226000

Edwards EMF10 A46226000 — Oil mist filter
Price on request
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Edwards Vacuum oil 5LPartsLead time on quote
Edwards

Vacuum oil 5L

Edwards Vacuum oil 5L — Ultragrade 70
Price on request
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Gardner denver 3

7201486000
PartsLead time on quote
Gardner denver

7201486000

Gardner denver 7201486000 — OIL ECOLUBE 5 LITRE
Price on request
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Gardner denver 7314680000PartsLead time on quote
Gardner denver

7314680000

Gardner denver 7314680000 — oil separator element
Price on request
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Gardner denver 7201506000PartsLead time on quote
Gardner denver

7201506000

Gardner denver 7201506000 — OIL MULTI LUBE 46 1 LITRE
Price on request
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Solvay 3

Solvay Y LVAC 25/6PartsLead time on quote
Solvay

Y LVAC 25/6

Solvay Y LVAC 25/6 — oil - Fomblin Y LVAC 25/6,250kg
$13,500 Reference price
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Solvay YVAC 3PartsLead time on quote
Solvay

YVAC 3

Solvay YVAC 3 — Fomblin YVAC 3 (100g)
Price on request
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Solvay LVAC 25/6PartsLead time on quote
Solvay

LVAC 25/6

Solvay LVAC 25/6 — Fomblin Y LVAC 25/6 ,1kg
Price on request
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Other brands 6

Becker U 5.201PartsLead time on quote
Becker

U 5.201

Becker U 5.201 — vacuum pump with FG300 air filter and gas ballast val
Price on request
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7201706000
PartsLead time on quote
Elmo

7201706000

Elmo 7201706000 — OIL GEAR-LUBE150 1 LITRE CAN
Price on request
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Elmo 7314686000PartsLead time on quote
Elmo

7314686000

Elmo 7314686000 — OIL SEPARATOR ELEMENT 40M3/H BAJ 80x102
$80 Reference price
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Agilent 9499394PartsLead time on quote
Agilent

9499394

Agilent 9499394 — Oil mist cartridge for oil mist eliminator for Varia
$250 Reference price
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GongHua GHV-F500PartsLead time on quote
GongHua

GHV-F500

GongHua GHV-F500 — 1L turbomolecular pump molecular pump oil, 1L
Price on request
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Fomblin Y LVAC 25/6 ,1kgPartsLead time on quote
Fomblin

Fomblin Y LVAC 25/6 ,1kg

Fomblin Fomblin Y LVAC 25/6 ,1kg — LVAC 25/6
Price on request
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Choosing vacuum pump oil

Vacuum pump fluid is a working part, not a consumable afterthought. It seals clearances, lubricates vanes and bearings, carries heat out and sets the pump's ultimate pressure — a pump running degraded oil loses vacuum long before it makes noise. Mineral oils suit general duty; double-distilled and synthetic hydrocarbons give lower vapour pressure; PFPE fluids are inert and are the only safe choice for oxygen, ozone and aggressive chemistry; silicone and polyphenyl ether fluids serve diffusion pumps.

Read the full guide →

FAQ

Which oil grade does my pump need?

Follow the pump manual: viscosity grade is matched to the pump's clearances and speed, and using a thinner or thicker oil costs you ultimate pressure or shaft power. Direct-drive rotary vane pumps generally take a lighter grade than belt-driven ones. If you have lost the manual, send the pump model.

Mineral, synthetic or PFPE — what is the difference?

Mineral oil is the cheapest and fine for clean air. Synthetic (PAO, ester) resists oxidation and higher temperature and lasts longer. PFPE (perfluoropolyether) is chemically inert and non-flammable — it is what you use with oxygen service or aggressive process gases, at many times the price.

Can I mix oil grades or brands?

Do not mix chemistries — mineral with PFPE in particular can form a gel and seize the pump. Mixing brands within the same chemistry and grade is tolerable when topping up, but at a full change drain, flush and refill with one product.

How do I dispose of used vacuum pump oil?

As hazardous waste through a licensed handler — used vacuum oil carries whatever the process put into it, which can include solvents, acids or particulates. Oil from a semiconductor or chemical process should never go into a general waste-oil drum without checking what is in it.