VAvat · 高真空气动摆阀
VAvat D1111-31-DN60~350 高真空气动摆阀
关键规格
型号D1111-31-DN60~350
品牌VAvat
接口 / 连接ISO-F · JIS B
配件匹配 · 询价确认
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交期随报价确认产品描述
Suitable for evaporators and sputtering systems. Designed for compact installation spaces, and particularly ideal for applications requiring corrosion resistance in other working environments. Pneumatic actuator (with normally closed spring); three-position pneumatic actuator (with normally closed spring); double-acting actuator Material: Aluminum alloy (materials optional). Sealing: O-ring seal. Opening diameters: DN60~350.
技术参数
| 系列 | VAvat |
|---|---|
| 通径 | DN60~350 |
| 主体材质 | Aluminum alloy (materials optional) |
| 驱动方式 | pneumatic normally closed / 3-position pneumatic, normally closed / pneumatic double-acting |
| 法兰类型 | ISO-F · JIS B |
| 密封方式 | O-ring seal |
| 漏率 | 1 × 10⁻⁹ mbar·L/s |
| 压力范围 | 1 × 10⁻⁸ mbar – 1.2 bar |
| Differential pressure on the valve plate | ≤ 1.2 bar |
| 开启压差 | ≤ 30 mbar (DN63–DN100); ≤ 10 mbar (DN160–DN200); ≤ 5 mbar (DN250–DN350) |
| Recommended maintenance cycle | 100,000 cycles (unheated, clean conditions) |
| 工作温度 | Valve body ≤ 120 °C; drive components ≤ 80 °C; position indicator ≤ 80 °C |
| 开/关时间 | ≤ 5 s (depends on compensation pressure of the compressed air) |
| 部件材质 | Valve body / bonnet / plate: aluminum alloy |
| 安装方向 | Any orientation |
| 压缩空气压力 | 0.55 MPa – 0.7 MPa |
| 位置反馈 | DC ≤ 24 V, DC ≤ 100 mA |
| 型号示例 | VAvat-D1111-31-DN60~350 (Pneumatic, normally closed) · VAvat-D5111-31-DN60~350 (3-position pneumatic, normally closed 3-position pneumatic, normally closed) · VAvat-D1113-31-DN60~350 (Pneumatic, double-acting) |
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