VAvat · High Vacuum Pneumatic Pendulum Valve
VAvat D1111-31-DN60~350 High Vacuum Pendulum Valve
Key specifications
ModelD1111-31-DN60~350
BrandVAvat
Connection / interfaceISO-F · JIS B
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Lead time on quoteDescription
Suitable for evaporators and sputtering systems. Designed for compact installation spaces, and particularly ideal for applications requiring corrosion resistance in other working environments. Pneumatic actuator (with normally closed spring); three-position pneumatic actuator (with normally closed spring); double-acting actuator Material: Aluminum alloy (materials optional). Sealing: O-ring seal. Opening diameters: DN60~350.
Technical data
| Series | VAvat |
|---|---|
| Opening diameter / bore | DN60~350 |
| Main material | Aluminum alloy (materials optional) |
| Driver | pneumatic normally closed / 3-position pneumatic, normally closed / pneumatic double-acting |
| Flange type | ISO-F · JIS B |
| Sealing method | O-ring seal |
| Leakage rate | 1 × 10⁻⁹ mbar·L/s |
| Pressure range | 1 × 10⁻⁸ mbar – 1.2 bar |
| Differential pressure on the valve plate | ≤ 1.2 bar |
| Opening differential pressure | ≤ 30 mbar (DN63–DN100); ≤ 10 mbar (DN160–DN200); ≤ 5 mbar (DN250–DN350) |
| Recommended maintenance cycle | 100,000 cycles (unheated, clean conditions) |
| Operating temperature | Valve body ≤ 120 °C; drive components ≤ 80 °C; position indicator ≤ 80 °C |
| Opening / closing time | ≤ 5 s (depends on compensation pressure of the compressed air) |
| Material of components | Valve body / bonnet / plate: aluminum alloy |
| Mounting position | Any orientation |
| Compressed air range | 0.55 MPa – 0.7 MPa |
| Position feedback | DC ≤ 24 V, DC ≤ 100 mA |
| Example model numbers | VAvat-D1111-31-DN60~350 (Pneumatic, normally closed) · VAvat-D5111-31-DN60~350 (3-position pneumatic, normally closed 3-position pneumatic, normally closed) · VAvat-D1113-31-DN60~350 (Pneumatic, double-acting) |
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