VAvat · 高真空L型传送阀
VAvat L1113-61-B 高真空L型传送阀
其它写法: L111361B
关键规格
型号L1113-61-B
品牌VAvat
配件匹配 · 询价确认
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交期随报价确认产品描述
Widely used in the semiconductor manufacturing industry for the isolation of process chambers and other demanding application industries. It is particularly suitable for corrosive processes such as etching or CVD. No particle generation, long cyclic service life (customization available upon request) Material: Aviation aluminum alloy or stainless steel (customizable upon request). Sealing: Fluororubber seal + bellows seal. Opening diameters: DN336×50, DN480×50, DN496×56, DN500×80, DN800×100.
技术参数
| 系列 | VAvat |
|---|---|
| 通径 | DN336×50 · DN480×50 · DN496×56 · DN500×80 · DN800×100 |
| 主体材质 | Aluminum alloy |
| 驱动方式 | Pneumatic, double-acting |
| 密封方式 | Fluororubber seal + bellows seal |
| 漏率 (FKM 密封,铝) | < 1 × 10⁻⁹ mbar·L/s |
| 漏率 (metal seal, stainless steel only) | < 5 × 10⁻¹⁰ mbar·L/s |
| 压力范围 | 1 × 10⁻⁹ mbar to 1 bar (aluminum, raw/nickel-plated); 5 × 10⁻¹⁰ mbar to 1 bar (stainless steel, metal-sealed) |
| 阀门压差 | ≤ 1 bar |
| 开启压差 | ≤ 30 mbar (DN336×50–DN500×80); ≤ 10 mbar (DN800×100) |
| 保养周期 | ≥ 1,000,000 cycles (DN336×50–DN496×56); ≥ 800,000 cycles (DN500×80–DN800×100) |
| 工作温度 | Valve body ≤ 120 °C; valve plate ≤ 120 °C; drive components ≤ 80 °C |
| 压缩空气 | 0.5 MPa – 0.7 MPa |
| 位置反馈 | DC ≤ 24 V, DC ≤ 100 mA |
| 型号示例 | VAvat-L1113-61-B-DN336×50 · VAvat-L1113-61-B-DN480×50 · VAvat-L1113-61-B-DN496×56 · VAvat-L1113-61-B-DN500×80 · VAvat-L1113-61-B-DN800×100 |
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