VAvat · High Vacuum L-Type Transfer Valve

VAvat L1113-61-B High Vacuum L-Type Transfer Valve

Name: VAvat L1113-61-B High Vacuum L-Type Transfer Valve
Brand: VAvat
SKU: vavat-high-vacuum-l-type-transfer-valve

Also written as: L111361B

Key specifications

ModelL1113-61-B

BrandVAvat

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Description

Widely used in the semiconductor manufacturing industry for the isolation of process chambers and other demanding application industries. It is particularly suitable for corrosive processes such as etching or CVD. No particle generation, long cyclic service life (customization available upon request) Material: Aviation aluminum alloy or stainless steel (customizable upon request). Sealing: Fluororubber seal + bellows seal. Opening diameters: DN336×50, DN480×50, DN496×56, DN500×80, DN800×100.

Technical data

Series	VAvat
Opening diameter / bore	DN336×50 · DN480×50 · DN496×56 · DN500×80 · DN800×100
Main material	Aluminum alloy
Driver	Pneumatic, double-acting
Sealing method	Fluororubber seal + bellows seal
Leakage rate (FKM seal, aluminum)	< 1 × 10⁻⁹ mbar·L/s
Leakage rate (metal seal, stainless steel only)	< 5 × 10⁻¹⁰ mbar·L/s
Pressure range	1 × 10⁻⁹ mbar to 1 bar (aluminum, raw/nickel-plated); 5 × 10⁻¹⁰ mbar to 1 bar (stainless steel, metal-sealed)
Valve differential pressure	≤ 1 bar
Opening differential pressure	≤ 30 mbar (DN336×50–DN500×80); ≤ 10 mbar (DN800×100)
Maintenance interval	≥ 1,000,000 cycles (DN336×50–DN496×56); ≥ 800,000 cycles (DN500×80–DN800×100)
Operating temperature	Valve body ≤ 120 °C; valve plate ≤ 120 °C; drive components ≤ 80 °C
Compressed air	0.5 MPa – 0.7 MPa
Position feedback	DC ≤ 24 V, DC ≤ 100 mA
Example model numbers	VAvat-L1113-61-B-DN336×50 · VAvat-L1113-61-B-DN480×50 · VAvat-L1113-61-B-DN496×56 · VAvat-L1113-61-B-DN500×80 · VAvat-L1113-61-B-DN800×100