VAvat L1113-61-B High Vacuum L-Type Transfer Valve
Key specifications
Description
Widely used in the semiconductor manufacturing industry for the isolation of process chambers and other demanding application industries. It is particularly suitable for corrosive processes such as etching or CVD. No particle generation, long cyclic service life (customization available upon request) Material: Aviation aluminum alloy or stainless steel (customizable upon request). Sealing: Fluororubber seal + bellows seal. Opening diameters: DN336×50, DN480×50, DN496×56, DN500×80, DN800×100.
Technical data
| Series | VAvat |
|---|---|
| Opening diameter / bore | DN336×50 · DN480×50 · DN496×56 · DN500×80 · DN800×100 |
| Main material | Aluminum alloy |
| Driver | Pneumatic, double-acting |
| Sealing method | Fluororubber seal + bellows seal |
| Leakage rate (FKM seal, aluminum) | < 1 × 10⁻⁹ mbar·L/s |
| Leakage rate (metal seal, stainless steel only) | < 5 × 10⁻¹⁰ mbar·L/s |
| Pressure range | 1 × 10⁻⁹ mbar to 1 bar (aluminum, raw/nickel-plated); 5 × 10⁻¹⁰ mbar to 1 bar (stainless steel, metal-sealed) |
| Valve differential pressure | ≤ 1 bar |
| Opening differential pressure | ≤ 30 mbar (DN336×50–DN500×80); ≤ 10 mbar (DN800×100) |
| Maintenance interval | ≥ 1,000,000 cycles (DN336×50–DN496×56); ≥ 800,000 cycles (DN500×80–DN800×100) |
| Operating temperature | Valve body ≤ 120 °C; valve plate ≤ 120 °C; drive components ≤ 80 °C |
| Compressed air | 0.5 MPa – 0.7 MPa |
| Position feedback | DC ≤ 24 V, DC ≤ 100 mA |
| Example model numbers | VAvat-L1113-61-B-DN336×50 · VAvat-L1113-61-B-DN480×50 · VAvat-L1113-61-B-DN496×56 · VAvat-L1113-61-B-DN500×80 · VAvat-L1113-61-B-DN800×100 |
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