VAvat RA1113-52-B All-Metal Valve
Key specifications
Description
Mainly used in semiconductor processes and applications requiring high vacuum levels, where particles and contaminants in the vacuum system must not be affected by any factors. Therefore, a non-particle-generating valve with excellent sealing performance is required to protect the high-vacuum system. Protect the system and equipment from damage, and ensure the health and safety of equipment in a particle-free environment. Material: Stainless steel; bellows SUS316L. Sealing: Metal seal. Opening diameters: DN60~320, DN16~100 (手动全金属角阀 Manual all-metal angle valve).
Technical data
| Series | VAvat |
|---|---|
| Opening diameter / bore | DN60~320 · DN16~100 (Manual all-metal angle valve) |
| Main material | Stainless steel |
| Driver | pneumatic double-acting / pneumatic with solenoid valve / manual |
| Flange type | CF-F |
| Sealing method | Metal seal |
| Leakage rate | 1 × 10⁻¹⁰ mbar·L/s (valve body and valve seat) |
| Pressure range | XUHV to 2 bar |
| Pressure difference bearable by valve plate | ≤ 2 bar |
| Recommended instantaneous pressure difference for opening | ≤ 1 bar (DN16–DN40); ≤ 500 mbar (DN63–DN320, exceeding shortens service life) |
| Recyclable service life before first maintenance | 20,000 cycles (DN16–DN200); 5,000 cycles (DN250–DN320) |
| Operating temperature | Valve body ≤ 250 °C (open) / ≤ 200 °C (closed), high-temperature operating time ≥ 24 h; actuator ≤ 200 °C; position feedback device ≤ 80 °C; solenoid valve ≤ 50 °C |
| Heating and cooling rate | 50 °C/h |
| Component material | Valve body / plate: stainless steel; bellows: SUS316L |
| Installation position | Drive facing up or down |
| Compressed air range | 0.5 MPa – 0.7 MPa |
| Compressed air connection | G1/8" threaded connection |
| Solenoid valve parameters | 24V DC, 5.4W (not included as standard; please note when placing an order) |
| Position feedback | Imported wear-resistant elastic switch; AC ≤ 250 V / DC ≤ 50 V; AC ≤ 2.0 A / DC ≤ 1.2 A |
| Example model numbers | VAvat-RA1113-52-B-DN60~320 (pneumatic double-acting) · VAvat-RA1113-52024-B-DN60~320 (pneumatic with solenoid valve) · VAvat-RB3144-52-B-DN16~100 (manual all-metal angle valve) |
FAQ
What flange or port does the RA1113-52-B use?
RA1113-52-B connections: Flange type CF-F.
How do I get a price and lead time for the RA1113-52-B?
Send the model and quantity through the quote form on this page, or email vacuum@xiamenbest.com. We reply with price and lead time within 24 hours, and ship worldwide from Xiamen, China.
Need a confirmed configuration?
Share your application, target vacuum and voltage. We will match the pump or part and return a formal quote.
We build an equivalent — same duty, far lower cost
Taixing is a vacuum equipment manufacturer with its own 20,000 m2 plant and sixteen years in the industry. We build Products to the same duty as this imported unit, at factory-direct cost. Send your process conditions (gas, pressure range, flow) and we will match a model and quote.
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