Mibay Non-Standard Ultra-High Vacuum 真空机组

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## Non-Standard Ultra-High Vacuum Pump System with Triple-Stage Pump Configuration The Non-Standard Ultra-High Vacuum Pump System features a triple-stage pump (molecular, Roots, and rotary vane) and PLC control, delivering a 3×10⁻⁵ Pa vacuum for high-precision industrial applications like semiconductor and scientific research. Inquire Now Product categories - Dry vacuum pump dry scroll pumps - Dry screw Pumps - Roots pumps - Claw vacuum pump - screw vacuum pump - Oil Vacuum pump Two stage Rotary Vane Pumps - Single-stage Rotary Vane Pumps - Oil-Free Scroll Vacuum Pump - Oil diffusion pump - Helium Leak Detector helium mass spectrometer leak detector - Leak detector accessories - Leak Detector Repair Parts - Mass spectrometer - Vacuum Leak Detection Equipment - Vacuum Gauge - Vacuum Pump System Turbo Molecular Vacuum Pump - Custom Vacuum Systems - Vacuum pump Oil - Vacuum Accessories compatible part molecular pump non-standard maintenance parts - Vacuum pump maintenance and repair accessories - Vacuum Value - Other Equipments how can we help you You can contact us any way that is convenient for you. We are available 24/7 via email or telephone. Contact Us New Products - SX Liquid Ring Monoblock Vacuum Compressors for Industrial Applications Read More - Semi-automatic Leak Detection Box TLDB-085 for High-Precision Chip Packaging and Vacuum Systems Read More - TPR500 5LED Digital Display Pirani Vacuum Gauge for Precision Low Vacuum Monitoring Read More - CFV 106 Pyrani/Cold Cathode Composite Vacuum Gauge for Wide-Range Vacuum Measurement Read More - RCP230N Handheld Pirani Vacuum Gauge for Mobile Vacuum Measurement Read More - PVG 550 Membrane Resistor High-Precision Composite Vacuum Gauge for Vacuum Systems Read More - PRG-500 Digital Pirani Vacuum Gauge for Precise Medium and Low Vacuum Measurement Read More - RBP series resistance vacuum pressure transmission RBP-101 Read More - Product Details ## Why Choose the Non-Standard Ultra-High Vacuum Pump System? The Non-Standard Ultra-High Vacuum Pump System is designed for demanding industrial environments requiring ultra-high vacuum levels. Featuring a triple-stage pump configuration—JTFB-1200 water-cooled molecular pump, BSJ150L Roots pump, and 2X-70 rotary vane pump—it achieves an ultimate vacuum of 3×10⁻⁵ Pa. The integrated PLC control system with a touchscreen interface ensures fully automated operation, enhancing process stability and efficiency. With robust construction and water-cooled technology, this system is ideal for semiconductor manufacturing, scientific research, and other precision vacuum applications. ## Key Features of the Non-Standard Ultra-High Vacuum Pump System - Triple-Stage Pump Configuration Combines a molecular pump (1200 L/s), Roots pump (150 L/s), and rotary vane pump (70 L/min) for full-range vacuum coverage from atmospheric pressure to ultra-high vacuum. - Ultra-High Vacuum Performance Achieves an ultimate vacuum of 3×10⁻⁵ Pa, surpassing industrial requirements for high-precision processes. - Water-Cooled Molecular Pump The JTFB-1200 molecular pump uses a water-cooling system to ensure stable operation under high loads. - Intelligent PLC Control System Features automated pressure regulation, multi-pump coordination, and fault self-diagnosis for reliable operation. - High-Precision Vacuum Monitoring Equipped with a composite vacuum gauge (KF40 ionization + KF16 couple) with a range of 1×10⁵ to 1×10⁻⁵ Pa. - Fast-Response Valve System Includes two KF25 pneumatic angle valves ( ## Applications of the Non-Standard Ultra-High Vacuum Pump System - Semiconductor Manufacturing Ensures ultra-high vacuum for wafer fabrication and other cleanroom processes. - Scientific Research Supports high-vacuum experiments in particle accelerators and material science labs. - Aerospace Industry Provides vacuum solutions for testing satellite components and propulsion systems. - Optical Coating Enables precise vacuum conditions for thin-film deposition in opti