Mibay · Non-Standard Ultra-High Vacuum Pump System with Triple-Stage Pump Configuration
Mibay Non-Standard Ultra-High Vacuum Pump System with Triple-Stage Pump Configuration
关键规格
型号Non-Standard Ultra-High Vacuum
品牌Mibay
极限真空≤3×10⁻⁵ Pa
接口 / 连接3× stainless steel bellows (300 mm, 500 mm, 800 mm)
配件匹配 · 询价确认
价格询盘 支持B2B批量
交期随报价确认产品描述
The Non-Standard Ultra-High Vacuum Pump System features a triple-stage pump (molecular, Roots, and rotary vane) and PLC control, delivering a 3×10⁻⁵ Pa vacuum for high-precision industrial applications like semiconductor and scientific research.
技术参数
| 规格 | Value |
|---|---|
| 产品类型 | Non-Standard Ultra-High Vacuum Pump System |
| 极限真空 | ≤3×10⁻⁵ Pa |
| Molecular Pump Draw Speed | 1200 L/s (JTFB-1200) |
| Roots Pump Draw Speed | 150 L/s (BSJ150L) |
| Rotary Vane Pump Draw Speed | 70 L/min (2X-70) |
| Vacuum Measurement Range | 1×10⁵ to 1×10⁻⁵ Pa |
| Valve System | 2× KF25 pneumatic angle valves (<0.5s response), 1× DN200 baffle valve |
| 冷却方式 | Water-cooled (molecular pump) |
| 电源 | 380V, three-phase, 50Hz |
| Frame Design | Stainless steel, ≥300 kg capacity, with casters and enclosure |
| Connection System | 3× stainless steel bellows (300 mm, 500 mm, 800 mm) |
| Control System | PLC with touchscreen interface, multi-pump control, fault diagnosis |
| 外形尺寸 | [To be specified based on design] |
| 重量 | ≥300 kg |
| 工作温度 | 5–40°C |
| 最大湿度 | 80% |
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