Mibay · Non-Standard Ultra-High Vacuum Pump System with Triple-Stage Pump Configuration

Mibay Non-Standard Ultra-High Vacuum Pump System with Triple-Stage Pump Configuration

Name: Mibay Non-Standard Ultra-High Vacuum Pump System with Triple-Stage Pump Configuration
Brand: Mibay
SKU: mb-non-standard-ultra-high-vacuum-pump-system-with-triple-stage-pump-configuration

Key specifications

ModelNon-Standard Ultra-High Vacuum

BrandMibay

Ultimate vacuum≤3×10⁻⁵ Pa

Connection / interface3× stainless steel bellows (300 mm, 500 mm, 800 mm)

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Description

The Non-Standard Ultra-High Vacuum Pump System features a triple-stage pump (molecular, Roots, and rotary vane) and PLC control, delivering a 3×10⁻⁵ Pa vacuum for high-precision industrial applications like semiconductor and scientific research.

Technical data

Specification	Value
Product Type	Non-Standard Ultra-High Vacuum Pump System
Ultimate Vacuum	≤3×10⁻⁵ Pa
Molecular Pump Draw Speed	1200 L/s (JTFB-1200)
Roots Pump Draw Speed	150 L/s (BSJ150L)
Rotary Vane Pump Draw Speed	70 L/min (2X-70)
Vacuum Measurement Range	1×10⁵ to 1×10⁻⁵ Pa
Valve System	2× KF25 pneumatic angle valves (<0.5s response), 1× DN200 baffle valve
Cooling Method	Water-cooled (molecular pump)
Power Supply	380V, three-phase, 50Hz
Frame Design	Stainless steel, ≥300 kg capacity, with casters and enclosure
Connection System	3× stainless steel bellows (300 mm, 500 mm, 800 mm)
Control System	PLC with touchscreen interface, multi-pump control, fault diagnosis
Dimensions	[To be specified based on design]
Weight	≥300 kg (661.4 lb)
Operating Temperature	5–40°C
Maximum Humidity	80%