Mibay · F-400/4500 Turbo Molecular Pump for High-Vacuum Industrial Applications
Mibay F-400/4500 Turbo Molecular Pump for High-Vacuum Industrial Applications
Key specifications
ModelF-400/4500
BrandMibay
Pumping speedN2: 4500, He: 3200, H2: 2000, Ar: 4200
Ultimate vacuum≤2×10⁻⁶ Pa
Connection / interfaceDN400 ISO-K
PART MATCHING · QUOTE REQUIRED
Price on request B2B volume available
Lead time on quoteDescription
The KYKY F-400/4500 Turbo Molecular Pump delivers a 4500 L/s pumping speed for N2, with oil lubrication and low-vibration design. Ideal for PVD, CVD, and semiconductor manufacturing.
Technical data
| Specification | Value |
|---|---|
| Product Type | Oil-lubricated Turbo Molecular Pump |
| Inlet Flange | DN400 ISO-K |
| Outlet Flange | DN100 KF |
| Pumping Speed (L/s) | N2: 4500, He: 3200, H2: 2000, Ar: 4200 |
| Gas Throughput (sccm) | N2: 5500, He: 4000, H2: 3200, Ar: 2100 |
| Compression Ratio | N2: 5×10⁷, He: 10³, H2: 5×10², Ar: 5×10⁷ |
| Ultimate Pressure | ≤2×10⁻⁶ Pa |
| Max. Continuous Fore-vacuum Pressure | 100 Pa (N2) |
| Max. Fore-vacuum Pressure | 300 Pa (N2) |
| Rotation Speed | 15,300 rpm |
| Run-Up Time | ≤10 minutes |
| Cooling Type | Water (standard) |
| Cooling Water Consumption | ≥1 L/min (0.04 CFM) |
| Cooling Water Temperature | ≤25°C |
| Power Supply | DC24V / AC220V |
| Max. Power Consumption | ≤1100 W |
| Controller Model | FD-III |
| Weight | 118 kg (260.1 lb) |
| Operating Temperature Range | 5–40°C |
| Maximum Humidity | 80% |
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