Mibay · LNG-600-I High Vacuum Exhaust Unit for Large-Scale Industrial Vacuum Processing
Mibay LNG-600 I High Vacuum Exhaust Unit for Large-Scale Industrial
Key specifications
ModelLNG-600
BrandMibay
Pumping speed18 m³/h (mechanical pump)
Ultimate vacuum≤3×10⁻⁵ Pa
PART MATCHING · QUOTE REQUIRED
Price on request B2B volume available
Lead time on quoteDescription
The LNG-600-I High Vacuum Exhaust Unit combines an 18 m³/h mechanical pump with a 600 L/s molecular pump, achieving an ultimate vacuum of 3×10⁻⁵ Pa. Designed for industrial applications, it features a robust mobile platform and is ideal for semiconductor, coating, and scientific research industries.
Technical data
| Specification | Value |
|---|---|
| Product Type | High Vacuum Exhaust Unit |
| Ultimate Vacuum | ≤3×10⁻⁵ Pa |
| Roughing Pump Speed | 18 m³/h (mechanical pump) |
| Molecular Pump Speed | 600 L/s (nitrogen) |
| Vacuum Achievement Time | 5×10⁻⁴ Pa in ≤30 minutes |
| Measurement Range | 1×10⁵ to 1×10⁻⁵ Pa |
| Startup Vacuum | Better than 3×10⁻³ Pa at 400 Hz |
| Power Supply | 380V, 50Hz (industrial-grade) |
| System Weight | ≈150 kg |
| Dimensions | Refer to outline dimension diagram |
| Mobile Platform | Industrial trolley with brake-equipped casters, ≥200 kg capacity |
| Test Hood | 304 stainless steel, 180 mm diameter × 138 mm height |
| Operating Temperature | 5–40°C |
| Maximum Humidity | 80% |
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