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Mibay · TGX Series Dry Screw Vacuum System: High-Efficiency Vacuum for Semiconductor & Cleanroom Applications

Mibay TGX Series Dry Screw Vacuum Sy Dry Screw Vacuum Pump

Key specifications

ModelTGX Series Dry Screw Vacuum Sy
BrandMibay
Ultimate vacuum0.1 | 0.1
Power7.5 | 11
Connection / interfaceDN100 | DN160
PART MATCHING · QUOTE REQUIRED
Price on request B2B volume available
Order
Send the model or a product photo and our team will confirm the exact configuration.

Description

## TGX Series Dry Screw Vacuum System: High-Efficiency Vacuum for Semiconductor & Cleanroom Applications The TGX Series Dry Screw Vacuum System by Mibay Vacuum is a state-of-the-art solution engineered for high-vacuum applications in semiconductor manufacturing, cleanroom environments, and industrial processes. Featuring innovative screw technology, advanced shaft seals, and a smart control system, the TGX Series achieves ultimate vacuum levels of 0.1 Pa (0.0015 Torr) with low noise (≤68 dB) and minimal vibration. Its customizable configurations and low-maintenance design make it a reliable and cost-effective choice for demanding applications. Inquire Now Product categories - Dry vacuum pump dry scroll pumps - Dry screw Pumps - Roots pumps - Claw vacuum pump - screw vacuum pump - Oil Vacuum pump Two stage Rotary Vane Pumps - Single-stage Rotary Vane Pumps - Oil-Free Scroll Vacuum Pump - Oil diffusion pump - Helium Leak Detector helium mass spectrometer leak detector - Leak detector accessories - Leak Detector Repair Parts - Mass spectrometer - Vacuum Leak Detection Equipment - Vacuum Gauge - Vacuum Pump System Turbo Molecular Vacuum Pump - Custom Vacuum Systems - Vacuum pump Oil - Vacuum Accessories compatible part molecular pump non-standard maintenance parts - Vacuum pump maintenance and repair accessories - Vacuum Value - Other Equipments how can we help you You can contact us any way that is convenient for you. We are available 24/7 via email or telephone. Contact Us New Products - SX Liquid Ring Monoblock Vacuum Compressors for Industrial Applications Read More - Semi-automatic Leak Detection Box TLDB-085 for High-Precision Chip Packaging and Vacuum Systems Read More - TPR500 5LED Digital Display Pirani Vacuum Gauge for Precision Low Vacuum Monitoring Read More - CFV 106 Pyrani/Cold Cathode Composite Vacuum Gauge for Wide-Range Vacuum Measurement Read More - RCP230N Handheld Pirani Vacuum Gauge for Mobile Vacuum Measurement Read More - PVG 550 Membrane Resistor High-Precision Composite Vacuum Gauge for Vacuum Systems Read More - PRG-500 Digital Pirani Vacuum Gauge for Precise Medium and Low Vacuum Measurement Read More - RBP series resistance vacuum pressure transmission RBP-101 Read More - Product Details Explore the TGX Series Dry Screw Vacuum System by Mibay Vacuum, offering ultimate vacuum levels of 0.1 Pa and low-noise operation (≤68 dB). With innovative screw technology and smart controls, it’s ideal for semiconductor manufacturing and cleanroom environments. ## Why Choose the TGX Series Dry Screw Vacuum System ? The TGX Series stands out as a high-performance vacuum solution tailored for precision and efficiency. With its oil-free vacuum space, advanced temperature control, and intelligent onboard control panel, it meets the stringent requirements of cleanroom environments and industrial processes. The TGX140 and TGX280 models offer flexible configurations, making them ideal for semiconductor manufacturing, custom vacuum systems, and other high-vacuum applications. ## Key Features of the TGX Series 1. Innovative Screw Technology: High-efficiency driver and optimized thermal management ensure consistent performance and long maintenance intervals. 2. Advanced Shaft Seal Technology: Non-contact, long-life seals protect the gearbox and maintain an oil-free vacuum space for cleanroom compliance. 3. Smart Control System: Intelligent onboard panel with automatic start/stop, power-saving modes, green frequency conversion, and self-cleaning options for user-friendly operation. 4. Low Vibration and Noise: Operates at ≤68 dB with minimal vibration, ideal for sensitive cleanroom environments. 5. Reinforced Screw Rotor: Gradual compression enhances thermal control and vacuum performance. 6. Customizable Configurations: Supports single or multiple pump setups to meet specific light to medium application needs. 7. Long-Life Bearings and Lubrication: Oil-lubricated gears and grease-free operation reduce maintenance cost

Technical data

Product TypeDry Screw Vacuum System | Dry Screw Vacuum System
Displacement (L/s)140 | 280
Displacement (m³/h)450 | 900
Ultimate Vacuum (Pa)0.1 | 0.1
Ultimate Vacuum (Torr)0.0015 | 0.0015
Motor Power (kW)7.5 | 11
Nominal Rotation Speed (rpm)Roots: 2900, Screw: 2900 | Roots: 2900, Screw: 2900
Nitrogen Pressure (MPa)0.05–0.1 | 0.05–0.1
Nitrogen Flow (L/min)0.5 | 0.5
Cooling Water Pressure (MPa)0.2–0.4 | 0.2–0.4
Cooling Water Differential Pressure (L/min)0.1 | 0.1
Cooling Water Flow (L/min)3–5 | 3–5
Cooling Water Temperature (°C)10–30 | 10–30
Inlet Flange (mm)DN100 | DN160
Exhaust Flange (mm)DN40 | DN40
Noise Level (dB)≤68 | ≤68
Weight (kg)350 | 480

FAQ

What ultimate pressure does the TGX Series Dry Screw Vacuum Sy reach?

TGX Series Dry Screw Vacuum Sy ultimate pressure: Ultimate Vacuum (Pa) 0.1 | 0.1 · Ultimate Vacuum (Torr) 0.0015 | 0.0015.

What flange or port does the TGX Series Dry Screw Vacuum Sy use?

TGX Series Dry Screw Vacuum Sy connections: Inlet Flange (mm) DN100 | DN160 · Exhaust Flange (mm) DN40 | DN40.

What power supply does the TGX Series Dry Screw Vacuum Sy need?

TGX Series Dry Screw Vacuum Sy power: Motor Power (kW) 7.5 | 11.

How big and heavy is the TGX Series Dry Screw Vacuum Sy?

TGX Series Dry Screw Vacuum Sy: Weight (kg) 350 | 480.

How do I get a price and lead time for the TGX Series Dry Screw Vacuum Sy?

Send the model and quantity through the quote form on this page, or email vacuum@xiamenbest.com. We reply with price and lead time within 24 hours, and ship worldwide from Xiamen, China.

Need a confirmed configuration?

Share your application, target vacuum and voltage. We will match the pump or part and return a formal quote.

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