VAvat E2113-11 高真空蝶阀
其它写法: E211311
关键规格
产品描述
This valve is an ideal solution for precise control in CVD and ALD processes. The valve plate acts as a throttling or isolating element, adjusting the conductance characteristics by changing the valve opening. The integrated pressure controller of the control valve calculates the required valve plate position to achieve the set pressure as quickly as possible. Flow regulation can be achieved via electric control, while on/off control can be realized via pneumatic actuation. Material: Aluminum alloy (materials optional). Sealing: Nitrile rubber (NBR), fluororubber (FKM), can be customized according to process requirements. Opening diameters: DN25~50 (电动 Electric), DN60~250 (电动 Electric), DN25~50 (气动 Pneumatic), DN60~320 (气动 Pneumatic).
技术参数
| 系列 | VAvat |
|---|---|
| 通径 | DN25~50 (Electric) · DN60~250 (Electric) · DN25~50 (Pneumatic) · DN60~320 (Pneumatic) |
| 主体材质 | Aluminum alloy (materials optional) |
| 驱动方式 | electric / pneumatic Electric / Pneumatic (solenoid valve available) |
| 法兰类型 | ISO-KF · ISO-F · CF-F · ASA-LP · JIS |
| 密封方式 | Nitrile rubber (NBR), fluororubber (FKM), can be customized according to process requirements |
| 漏率 | 1 × 10⁻⁹ mbar·L/s (valve body, valve seat) |
| 压力范围 | 1 × 10⁻⁸ mbar – 1.2 bar |
| Recyclable times before first maintenance (pressure controlled) | 2,000,000 cycles |
| Recyclable times before first maintenance (pneumatic) | 100,000 cycles |
| 工作温度 | Valve body ≤ 120 °C; drive components ≤ 50 °C |
| 开/关时间 | ≤ 1 s |
| 部件材质 | Valve body SUS304 / aluminum alloy; shaft SUS304/316L |
| 安装方向 | Any orientation |
| Max. differential pressure on valve plate | 1000 mbar (DN25) → 150 mbar (DN200) |
| Max. controllable conductance molecular flow | 22 L/s (DN25) → 7800 L/s (DN200) |
| Min. controllable conductance molecular flow | 0.15 L/s (DN25) → 2.8 L/s (DN200) |
| Position mode opening / closing time | 0.09 s (DN25) → 0.29 s (DN200) |
| 压缩空气 | 0.5 MPa – 0.7 MPa |
| Solenoid valve | 24V DC / 2W (optional) |
| 型号示例 | VAvat-E2113-11-DN25~50 · VAvat-E2113-31-DN60~250 · VAvat-E1113-11-DN25~50 · VAvat-E1113-31-DN60~250 |
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