VAvat E2113-11 High Vacuum Butterfly Valve
Also written as: E211311
Key specifications
Description
This valve is an ideal solution for precise control in CVD and ALD processes. The valve plate acts as a throttling or isolating element, adjusting the conductance characteristics by changing the valve opening. The integrated pressure controller of the control valve calculates the required valve plate position to achieve the set pressure as quickly as possible. Flow regulation can be achieved via electric control, while on/off control can be realized via pneumatic actuation. Material: Aluminum alloy (materials optional). Sealing: Nitrile rubber (NBR), fluororubber (FKM), can be customized according to process requirements. Opening diameters: DN25~50 (电动 Electric), DN60~250 (电动 Electric), DN25~50 (气动 Pneumatic), DN60~320 (气动 Pneumatic).
Technical data
| Series | VAvat |
|---|---|
| Opening diameter / bore | DN25~50 (Electric) · DN60~250 (Electric) · DN25~50 (Pneumatic) · DN60~320 (Pneumatic) |
| Main material | Aluminum alloy (materials optional) |
| Driver | electric / pneumatic Electric / Pneumatic (solenoid valve available) |
| Flange type | ISO-KF · ISO-F · CF-F · ASA-LP · JIS |
| Sealing method | Nitrile rubber (NBR), fluororubber (FKM), can be customized according to process requirements |
| Leak rate | 1 × 10⁻⁹ mbar·L/s (valve body, valve seat) |
| Pressure range | 1 × 10⁻⁸ mbar – 1.2 bar |
| Recyclable times before first maintenance (pressure controlled) | 2,000,000 cycles |
| Recyclable times before first maintenance (pneumatic) | 100,000 cycles |
| Operating temperature | Valve body ≤ 120 °C; drive components ≤ 50 °C |
| Opening / closing time | ≤ 1 s |
| Component material | Valve body SUS304 / aluminum alloy; shaft SUS304/316L |
| Mounting position | Any orientation |
| Max. differential pressure on valve plate | 1000 mbar (DN25) → 150 mbar (DN200) |
| Max. controllable conductance molecular flow | 22 L/s (DN25) → 7800 L/s (DN200) |
| Min. controllable conductance molecular flow | 0.15 L/s (DN25) → 2.8 L/s (DN200) |
| Position mode opening / closing time | 0.09 s (DN25) → 0.29 s (DN200) |
| Compressed air | 0.5 MPa – 0.7 MPa |
| Solenoid valve | 24V DC / 2W (optional) |
| Example model numbers | VAvat-E2113-11-DN25~50 · VAvat-E2113-31-DN60~250 · VAvat-E1113-11-DN25~50 · VAvat-E1113-31-DN60~250 |
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