VAvat E2113-11 High Vacuum Butterfly Valve
Key specifications
Description
This valve is an ideal solution for precise control in CVD and ALD processes. The valve plate acts as a throttling or isolating element, adjusting the conductance characteristics by changing the valve opening. The integrated pressure controller of the control valve calculates the required valve plate position to achieve the set pressure as quickly as possible. Flow regulation can be achieved via electric control, while on/off control can be realized via pneumatic actuation. Material: Aluminum alloy (materials optional). Sealing: Nitrile rubber (NBR), fluororubber (FKM), can be customized according to process requirements. Opening diameters: DN25~50 (电动 Electric), DN60~250 (电动 Electric), DN25~50 (气动 Pneumatic), DN60~320 (气动 Pneumatic).
Technical data
| Series | VAvat |
|---|---|
| Opening diameter / bore | DN25~50 (Electric) · DN60~250 (Electric) · DN25~50 (Pneumatic) · DN60~320 (Pneumatic) |
| Main material | Aluminum alloy (materials optional) |
| Driver | electric / pneumatic Electric / Pneumatic (solenoid valve available) |
| Flange type | ISO-KF · ISO-F · CF-F · ASA-LP · JIS |
| Sealing method | Nitrile rubber (NBR), fluororubber (FKM), can be customized according to process requirements |
| Leak rate | 1 × 10⁻⁹ mbar·L/s (valve body, valve seat) |
| Pressure range | 1 × 10⁻⁸ mbar – 1.2 bar |
| Recyclable times before first maintenance (pressure controlled) | 2,000,000 cycles |
| Recyclable times before first maintenance (pneumatic) | 100,000 cycles |
| Operating temperature | Valve body ≤ 120 °C; drive components ≤ 50 °C |
| Opening / closing time | ≤ 1 s |
| Component material | Valve body SUS304 / aluminum alloy; shaft SUS304/316L |
| Mounting position | Any orientation |
| Max. differential pressure on valve plate | 1000 mbar (DN25) → 150 mbar (DN200) |
| Max. controllable conductance molecular flow | 22 L/s (DN25) → 7800 L/s (DN200) |
| Min. controllable conductance molecular flow | 0.15 L/s (DN25) → 2.8 L/s (DN200) |
| Position mode opening / closing time | 0.09 s (DN25) → 0.29 s (DN200) |
| Compressed air | 0.5 MPa – 0.7 MPa |
| Solenoid valve | 24V DC / 2W (optional) |
| Example model numbers | VAvat-E2113-11-DN25~50 · VAvat-E2113-31-DN60~250 · VAvat-E1113-11-DN25~50 · VAvat-E1113-31-DN60~250 |
FAQ
What flange or port does the E2113-11 use?
E2113-11 connections: Flange type ISO-KF · ISO-F · CF-F · ASA-LP · JIS.
How do I get a price and lead time for the E2113-11?
Send the model and quantity through the quote form on this page, or email vacuum@xiamenbest.com. We reply with price and lead time within 24 hours, and ship worldwide from Xiamen, China.
Need a confirmed configuration?
Share your application, target vacuum and voltage. We will match the pump or part and return a formal quote.
We build an equivalent — same duty, far lower cost
Taixing is a vacuum equipment manufacturer with its own 20,000 m2 plant and sixteen years in the industry. We build Products to the same duty as this imported unit, at factory-direct cost. Send your process conditions (gas, pressure range, flow) and we will match a model and quote.
See Taixing models →Related Products
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