Mibay · TXFJ-300 Ultra-High Vacuum Pumping Unit for Semiconductor and Scientific Applications
Mibay TXFJ-300 Ultra-High Vacuum Pum ping Unit for Semiconductor and Scientific Applications
关键规格
型号TXFJ-300 Ultra-High Vacuum Pum
品牌Mibay
抽速300 L/s
极限真空≤3×10⁻⁵ Pa
接口 / 连接Customizable DN 100 ISO-K
配件匹配 · 询价确认
价格询盘 支持B2B批量
交期随报价确认产品描述
The TXFJ-300 Ultra-High Vacuum Pumping Unit delivers a 300 L/s pumping speed and ≤3×10⁻⁵ Pa ultimate vacuum. With an air-cooled molecular pump, compact mobile cart, and high-precision vacuum monitoring, it’s perfect for semiconductor, mass spectrometry, and medical applications.
技术参数
| 规格 | Value |
|---|---|
| 产品类型 | Ultra-High Vacuum Pumping Unit |
| 极限真空 | ≤3×10⁻⁵ Pa |
| 分子泵转速 | 300 L/s |
| Mechanical Pump Speed | 10 m³/h |
| 极限压力 (No Ballast) | ≤0.5 mbar (50 Pa); TVR10: ≤0.5 Pa |
| 极限压力 (With Ballast) | ≤2 Pa |
| 进气法兰 | Customizable DN 100 ISO-K |
| 出气法兰 | Customizable DN 16/25 ISO-KF |
| Test Chamber Size | Ø108 mm × 80 mm |
| 启动时间 | 3–5 minutes |
| 冷却方式 | Air-Cooled |
| 电源 | 220/230V or 380/400V, 50/60 Hz |
| 系统重量 | ≈80 kg |
| 外形尺寸 (Cart) | Stainless steel, ≥100 kg load capacity |
| 工作温度 | 10–40°C |
| Vibration Amplitude | ≤50 μm |
| 漏率 | ≤1×10⁻³ Pa/h |
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