
Mibay TXFJ-300 Ultra-High Vacuum Pum High Vacuum Pumping Unit
Key specifications
Description
## TXFJ-300 Ultra-High Vacuum Pumping Unit for Semiconductor and Scientific Applications The TXFJ-300 Ultra-High Vacuum Pumping Unit delivers a 300 L/s pumping speed and ≤3×10⁻⁵ Pa ultimate vacuum. With an air-cooled molecular pump, compact mobile cart, and high-precision vacuum monitoring, it’s perfect for semiconductor, mass spectrometry, and medical applications. Inquire Now Product categories - Dry vacuum pump dry scroll pumps - Dry screw Pumps - Roots pumps - Claw vacuum pump - screw vacuum pump - Oil Vacuum pump Two stage Rotary Vane Pumps - Single-stage Rotary Vane Pumps - Oil-Free Scroll Vacuum Pump - Oil diffusion pump - Helium Leak Detector helium mass spectrometer leak detector - Leak detector accessories - Leak Detector Repair Parts - Mass spectrometer - Vacuum Leak Detection Equipment - Vacuum Gauge - Vacuum Pump System Turbo Molecular Vacuum Pump - Custom Vacuum Systems - Vacuum pump Oil - Vacuum Accessories compatible part molecular pump non-standard maintenance parts - Vacuum pump maintenance and repair accessories - Vacuum Value - Other Equipments how can we help you You can contact us any way that is convenient for you. We are available 24/7 via email or telephone. Contact Us New Products - SX Liquid Ring Monoblock Vacuum Compressors for Industrial Applications Read More - Semi-automatic Leak Detection Box TLDB-085 for High-Precision Chip Packaging and Vacuum Systems Read More - TPR500 5LED Digital Display Pirani Vacuum Gauge for Precision Low Vacuum Monitoring Read More - CFV 106 Pyrani/Cold Cathode Composite Vacuum Gauge for Wide-Range Vacuum Measurement Read More - RCP230N Handheld Pirani Vacuum Gauge for Mobile Vacuum Measurement Read More - PVG 550 Membrane Resistor High-Precision Composite Vacuum Gauge for Vacuum Systems Read More - PRG-500 Digital Pirani Vacuum Gauge for Precise Medium and Low Vacuum Measurement Read More - RBP series resistance vacuum pressure transmission RBP-101 Read More - Product Details ## Why Choose the TXFJ-300 Ultra-High Vacuum Pump ing Unit? The TXFJ-300 from Mibay Vacuum is a state-of-the-art ultra-high vacuum pumping unit designed for precision and efficiency in demanding applications. Featuring a 300 L/s air-cooled composite molecular pump, a 10 m³/h mechanical pump, and a high-precision composite vacuum gauge, it achieves an ultimate vacuum of ≤3×10⁻⁵ Pa. Its compact mobile cart, air-cooled design, and user-friendly interface ensure low maintenance costs and seamless integration into laboratory and industrial environments like semiconductor manufacturing, mass spectrometry, and medical equipment. ## Key Features of the TXFJ-300 Ultra-High Vacuum Pumping Unit - High-Performance Molecular Pump Delivers a 300 L/s pumping speed with an ultimate vacuum of ≤3×10⁻⁵ Pa, meeting stringent high-vacuum requirements. - Efficient Mechanical Pump Provides a 10 m³/h pumping speed with mature technology for low failure rates and reliable performance. - Air-Cooled Design Eliminates water cooling, reducing installation complexity and maintenance costs. - High-Precision Vacuum Monitoring Equipped with a composite vacuum gauge (KF40 ionization gauge + KF16 couple gauge) covering a range of 1×10⁵ to 1×10⁻⁵ Pa. - Compact Mobile Design Features a stainless steel cart with ≥100 kg load capacity, ideal for flexible laboratory use. - Customizable Flanges and Valves Supports DN 100 ISO-K inlet and customizable NW 25/16 KF flanges for seamless system integration. - Rapid Startup Achieves operational readiness in 3–5 minutes, enhancing workflow efficiency. - Low Vibration Pump vibration amplitude ≤50 μm, ensuring stability in sensitive applications. - Robust Power Compatibility Supports 220/230V or 380/400V, 50/60 Hz power supplies for global use. - Durable Components Includes stainless steel bellows (DN40, 300 mm) and customizable valves for long-term reliability. ## Applications of the TXFJ-300 Ultra-High Vacuum Pumping Unit - Semiconductor Manufacturing Supports wafer processing w
Technical data
| Specification | Value |
|---|---|
| Product Type | Ultra-High Vacuum Pumping Unit |
| Ultimate Vacuum | ≤3×10⁻⁵ Pa |
| Molecular Pump Speed | 300 L/s (635.7 CFM) |
| Mechanical Pump Speed | 10 m³/h (5.9 CFM) |
| Ultimate Pressure (No Ballast) | ≤0.5 mbar (50 Pa); TVR10: ≤0.5 Pa |
| Ultimate Pressure (With Ballast) | ≤2 Pa |
| Inlet Flange | Customizable DN 100 ISO-K |
| Outlet Flange | Customizable DN 16/25 ISO-KF |
| Test Chamber Size | Ø108 mm × 80 mm |
| Startup Time | 3–5 minutes |
| Cooling Method | Air-Cooled |
| Power Supply | 220/230V or 380/400V, 50/60 Hz |
| System Weight | ≈80 kg |
| Dimensions (Cart) | Stainless steel, ≥100 kg load capacity |
| Operating Temperature | 10–40°C |
| Vibration Amplitude | ≤50 μm |
| Leakage Rate | ≤1×10⁻³ Pa/h |
FAQ
What ultimate pressure does the TXFJ-300 Ultra-High Vacuum Pum reach?
TXFJ-300 Ultra-High Vacuum Pum ultimate pressure: Ultimate Vacuum ≤3×10⁻⁵ Pa · Ultimate Pressure (No Ballast) ≤0.5 mbar (50 Pa); TVR10: ≤0.5 Pa · Ultimate Pressure (With Ballast) ≤2 Pa.
What power supply does the TXFJ-300 Ultra-High Vacuum Pum need?
TXFJ-300 Ultra-High Vacuum Pum power: Power Supply 220/230V or 380/400V, 50/60 Hz.
How big and heavy is the TXFJ-300 Ultra-High Vacuum Pum?
TXFJ-300 Ultra-High Vacuum Pum: System Weight ≈80 kg · Dimensions (Cart) Stainless steel, ≥100 kg load capacity.
How do I get a price and lead time for the TXFJ-300 Ultra-High Vacuum Pum?
Send the model and quantity through the quote form on this page, or email vacuum@xiamenbest.com. We reply with price and lead time within 24 hours, and ship worldwide from Xiamen, China.
Need a confirmed configuration?
Share your application, target vacuum and voltage. We will match the pump or part and return a formal quote.




