Mibay · TXFJ-300 Ultra-High Vacuum Pumping Unit for Semiconductor and Scientific Applications

Mibay TXFJ-300 Ultra-High Vacuum Pum ping Unit for Semiconductor and Scientific Applications

Name: Mibay TXFJ-300 Ultra-High Vacuum Pum ping Unit for Semiconductor and Scientific Applications
Brand: Mibay
SKU: mb-txfj-300-ultra-high-vacuum-pumping-unit-for-semiconductor-and-scientific-applications

Key specifications

ModelTXFJ-300 Ultra-High Vacuum Pum

BrandMibay

Pumping speed300 L/s

Ultimate vacuum≤3×10⁻⁵ Pa

Connection / interfaceCustomizable DN 100 ISO-K

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Description

The TXFJ-300 Ultra-High Vacuum Pumping Unit delivers a 300 L/s pumping speed and ≤3×10⁻⁵ Pa ultimate vacuum. With an air-cooled molecular pump, compact mobile cart, and high-precision vacuum monitoring, it’s perfect for semiconductor, mass spectrometry, and medical applications.

Technical data

Specification	Value
Product Type	Ultra-High Vacuum Pumping Unit
Ultimate Vacuum	≤3×10⁻⁵ Pa
Molecular Pump Speed	300 L/s (635.7 CFM)
Mechanical Pump Speed	10 m³/h (5.9 CFM)
Ultimate Pressure (No Ballast)	≤0.5 mbar (50 Pa); TVR10: ≤0.5 Pa
Ultimate Pressure (With Ballast)	≤2 Pa
Inlet Flange	Customizable DN 100 ISO-K
Outlet Flange	Customizable DN 16/25 ISO-KF
Test Chamber Size	Ø108 mm × 80 mm
Startup Time	3–5 minutes
Cooling Method	Air-Cooled
Power Supply	220/230V or 380/400V, 50/60 Hz
System Weight	≈80 kg
Dimensions (Cart)	Stainless steel, ≥100 kg load capacity
Operating Temperature	10–40°C
Vibration Amplitude	≤50 μm
Leakage Rate	≤1×10⁻³ Pa/h