Mibay FF-160 Turbo Molecular Vacuum Pump
Key specifications
Description
## FF-160/620E Turbo Molecular Pump for High-Performance Vacuum Applications The FF-160/620E Turbo Molecular Pump from KYKY delivers a 600 L/s pumping speed with oil lubrication, ideal for PVD, CVD, and semiconductor applications. Its compact design and high durability ensure reliable performance. Inquire Now Product categories - Dry vacuum pump dry scroll pumps - Dry screw Pumps - Roots pumps - Claw vacuum pump - screw vacuum pump - Oil Vacuum pump Two stage Rotary Vane Pumps - Single-stage Rotary Vane Pumps - Oil-Free Scroll Vacuum Pump - Oil diffusion pump - Helium Leak Detector helium mass spectrometer leak detector - Leak detector accessories - Leak Detector Repair Parts - Mass spectrometer - Vacuum Leak Detection Equipment - Vacuum Gauge - Vacuum Pump System Turbo Molecular Vacuum Pump - Custom Vacuum Systems - Vacuum pump Oil - Vacuum Accessories compatible part molecular pump non-standard maintenance parts - Vacuum pump maintenance and repair accessories - Vacuum Value - Other Equipments how can we help you You can contact us any way that is convenient for you. We are available 24/7 via email or telephone. Contact Us New Products - SX Liquid Ring Monoblock Vacuum Compressors for Industrial Applications Read More - Semi-automatic Leak Detection Box TLDB-085 for High-Precision Chip Packaging and Vacuum Systems Read More - TPR500 5LED Digital Display Pirani Vacuum Gauge for Precision Low Vacuum Monitoring Read More - CFV 106 Pyrani/Cold Cathode Composite Vacuum Gauge for Wide-Range Vacuum Measurement Read More - RCP230N Handheld Pirani Vacuum Gauge for Mobile Vacuum Measurement Read More - PVG 550 Membrane Resistor High-Precision Composite Vacuum Gauge for Vacuum Systems Read More - PRG-500 Digital Pirani Vacuum Gauge for Precise Medium and Low Vacuum Measurement Read More - RBP series resistance vacuum pressure transmission RBP-101 Read More - Product Details Engineered for industrial vacuum systems, the FF-160/620E offers a 600 L/s pumping speed, high compression ratios, and easy maintenance. Perfect for semiconductor manufacturing, optical coating, and vacuum furnaces, it ensures stable operation in demanding environments. ## Why Choose the FF-160/620E Turbo Molecular Pump ? The FF-160/620E Turbo Molecular Pump, developed by KYKY, is a high-performance, oil-lubricated vacuum pump designed for industrial and scientific applications. With a pumping speed of 600 L/s for N₂ and high compression ratios, it delivers exceptional vacuum performance. Its compact design, user-friendly operation, and robust construction make it ideal for harsh environments, ensuring long-term reliability in semiconductor manufacturing, optical coating, and vacuum furnaces. ## ## Key Features of the FF-160/620E Turbo Molecular Pump 1. High Pumping Speed Achieves 600 L/s for N₂, ensuring efficient vacuum creation for large-scale systems. 2. High Compression Ratios Offers compression ratios of 10⁹ for N₂ and Ar, 10⁵ for He, and 10⁴ for H₂, enabling ultra-high vacuum performance. 3. Compact and Flexible Design Supports DN150 CF/ISO-K inlet and DN40 KF outlet for versatile installation. 4. Durable in Harsh Environments Operates reliably in high-temperature and dusty conditions, ensuring consistent performance. 5. Fast Startup Reaches full rotation speed of 36,000 rpm in ≤9 minutes, minimizing downtime. 6. Efficient Cooling System Features water cooling (standard) with optional air cooling and low water consumption (≥1 L/min). 7. User-Friendly Operation Equipped with the TCDP-II controller and a 2.5m cable for simple and reliable control. 8. Low Power Consumption Operates at ≤500 W, optimizing energy efficiency for industrial applications. 9. Long Service Life Engineered for extended durability with minimal maintenance requirements. 10. High Fore-Vacuum Tolerance Supports continuous fore-vacuum pressure up to 240 Pa and maximum fore-vacuum pressure of 350 Pa for N₂. ## ## Applications of the FF-160/620E Turbo Molecular Pump 1. Semiconductor
Technical data
| Specification | Value |
|---|---|
| Product Type | Turbo Molecular Pump |
| Flange (In) | DN150 CF/ISO-K |
| Flange (Out) | DN40 KF |
| Pumping Speed (L/s) | N₂: 600 |
| Gas Throughput (sccm) | N₂: 1200, He: 880, H₂: 700, Ar: 450 |
| Compression Ratio | N₂: 10⁹, He: 10⁵, H₂: 10⁴, Ar: 10⁹ |
| Max. Continuous Fore-vacuum Pressure | 240 Pa |
| Max. Fore-vacuum Pressure | N₂: 350 Pa |
| Ultimate Pressure | CF: 6×10⁻⁸ Pa, ISO-K: 6×10⁻⁷ Pa |
| Rotation Speed | 36,000 rpm |
| Run-Up Time | ≤9 minutes |
| Cooling Type | Water (standard, air optional) |
| Cooling Water Consumption | ≥1 L/min (0.04 CFM) |
| Cooling Water Temperature | ≤25°C |
| Power Connection | 220±22 V AC, 50Hz |
| Max. Power Consumption | ≤500 W |
| Controller Model | TCDP-II (with 2.5m cable) |
| Dimensions (L×W×H) | Not specified (compact design) |
| Weight | Not specified |
| Operating Temperature Range | 5–40°C |
| Maximum Humidity | 80% |
FAQ
What is the pumping speed of the FF-160?
FF-160 pumping speed: Pumping Speed (L/s) N₂: 600.
What ultimate pressure does the FF-160 reach?
FF-160 ultimate pressure: Ultimate Pressure CF: 6×10⁻⁸ Pa, ISO-K: 6×10⁻⁷ Pa.
What flange or port does the FF-160 use?
FF-160 connections: Flange (In) DN150 CF/ISO-K · Flange (Out) DN40 KF.
What power supply does the FF-160 need?
FF-160 power: Power Connection 220±22 V AC, 50Hz · Max. Power Consumption ≤500 W.
How big and heavy is the FF-160?
FF-160: Dimensions (L×W×H) Not specified (compact design) · Weight Not specified.
How do I get a price and lead time for the FF-160?
Send the model and quantity through the quote form on this page, or email vacuum@xiamenbest.com. We reply with price and lead time within 24 hours, and ship worldwide from Xiamen, China.
Need a confirmed configuration?
Share your application, target vacuum and voltage. We will match the pump or part and return a formal quote.
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