Mibay · FF-160/620E Turbo Molecular Pump for High-Performance Vacuum Applications
Mibay FF-160 /620E Turbo Molecular Pump for High-Performance Vacuum Applications
Key specifications
ModelFF-160
BrandMibay
Pumping speedN₂: 600
Ultimate vacuumCF: 6×10⁻⁸ Pa, ISO-K: 6×10⁻⁷ Pa
Connection / interfaceDN150 CF/ISO-K
PART MATCHING · QUOTE REQUIRED
Price on request B2B volume available
Lead time on quoteDescription
The FF-160/620E Turbo Molecular Pump from KYKY delivers a 600 L/s pumping speed with oil lubrication, ideal for PVD, CVD, and semiconductor applications. Its compact design and high durability ensure reliable performance.
Technical data
| Specification | Value |
|---|---|
| Product Type | Turbo Molecular Pump |
| Flange (In) | DN150 CF/ISO-K |
| Flange (Out) | DN40 KF |
| Pumping Speed (L/s) | N₂: 600 |
| Gas Throughput (sccm) | N₂: 1200, He: 880, H₂: 700, Ar: 450 |
| Compression Ratio | N₂: 10⁹, He: 10⁵, H₂: 10⁴, Ar: 10⁹ |
| Max. Continuous Fore-vacuum Pressure | 240 Pa |
| Max. Fore-vacuum Pressure | N₂: 350 Pa |
| Ultimate Pressure | CF: 6×10⁻⁸ Pa, ISO-K: 6×10⁻⁷ Pa |
| Rotation Speed | 36,000 rpm |
| Run-Up Time | ≤9 minutes |
| Cooling Type | Water (standard, air optional) |
| Cooling Water Consumption | ≥1 L/min (0.04 CFM) |
| Cooling Water Temperature | ≤25°C |
| Power Connection | 220±22 V AC, 50Hz |
| Max. Power Consumption | ≤500 W |
| Controller Model | TCDP-II (with 2.5m cable) |
| Dimensions (L×W×H) | Not specified (compact design) |
| Weight | Not specified |
| Operating Temperature Range | 5–40°C |
| Maximum Humidity | 80% |
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