Mibay · CXF-320/3001E Magnetically Levitated Molecular Pump for High-Vacuum Applications
Mibay CXF-320 /3001E Magnetically Levitated Molecular Pump for High-Vacuum Applications
Key specifications
ModelCXF-320
BrandMibay
Pumping speed3200 L/s (Air)
Ultimate vacuum≤5×10⁻⁷ Pa
Connection / interfaceISO-F 320
PART MATCHING · QUOTE REQUIRED
Price on request B2B volume available
Lead time on quoteDescription
The CXF-320/3001E delivers a 3200 L/s pumping speed and ≤5×10⁻⁷ Pa ultimate vacuum. With fri onless magnetic bearings and corrosion-resistant design, it’s ideal for semiconductor, chip manufacturing, and scientific research.
Technical data
| Specification | Value |
|---|---|
| Product Type | Magnetically Levitated Molecular Pump |
| Pump Speed | 3200 L/s (Air) |
| Compression Ratio | >1×10⁸ |
| Ultimate Vacuum | ≤5×10⁻⁷ Pa |
| Inlet Flange | ISO-F 320 |
| Outlet Flange | KF 40 |
| Rotation Speed | 24,000 rpm |
| Run-up Time | 12 minutes |
| Backing Pump | 15 L/s (31.8 CFM) |
| Mounting Orientation | Any |
| Cooling Method | Water |
| Weight (with Controller) | 75 kg (165.3 lb) |
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