Mibay CXF-320 Turbo Molecular Vacuum Pump

Description

## CXF-320/3001E Magnetically Levitated Molecular Pump for High-Vacuum Applications The CXF-320/3001E delivers a 3200 L/s pumping speed and ≤5×10⁻⁷ Pa ultimate vacuum. With fri onless magnetic bearings and corrosion-resistant design, it’s ideal for semiconductor, chip manufacturing, and scientific research. Inquire Now Product categories - Dry vacuum pump dry scroll pumps - Dry screw Pumps - Roots pumps - Claw vacuum pump - screw vacuum pump - Oil Vacuum pump Two stage Rotary Vane Pumps - Single-stage Rotary Vane Pumps - Oil-Free Scroll Vacuum Pump - Oil diffusion pump - Helium Leak Detector helium mass spectrometer leak detector - Leak detector accessories - Leak Detector Repair Parts - Mass spectrometer - Vacuum Leak Detection Equipment - Vacuum Gauge - Vacuum Pump System Turbo Molecular Vacuum Pump - Custom Vacuum Systems - Vacuum pump Oil - Vacuum Accessories compatible part molecular pump non-standard maintenance parts - Vacuum pump maintenance and repair accessories - Vacuum Value - Other Equipments how can we help you You can contact us any way that is convenient for you. We are available 24/7 via email or telephone. Contact Us New Products - SX Liquid Ring Monoblock Vacuum Compressors for Industrial Applications Read More - Semi-automatic Leak Detection Box TLDB-085 for High-Precision Chip Packaging and Vacuum Systems Read More - TPR500 5LED Digital Display Pirani Vacuum Gauge for Precision Low Vacuum Monitoring Read More - CFV 106 Pyrani/Cold Cathode Composite Vacuum Gauge for Wide-Range Vacuum Measurement Read More - RCP230N Handheld Pirani Vacuum Gauge for Mobile Vacuum Measurement Read More - PVG 550 Membrane Resistor High-Precision Composite Vacuum Gauge for Vacuum Systems Read More - PRG-500 Digital Pirani Vacuum Gauge for Precise Medium and Low Vacuum Measurement Read More - RBP series resistance vacuum pressure transmission RBP-101 Read More - Product Details Engineered for high-vacuum environments, the CXF-320/3001E ensures zero-friction operation, contamination-free vacuum, and robust corrosive gas handling. Its magnetic bearing system and carbon fiber rotor provide reliability for semiconductor manufacturing, industrial plating, and scientific instruments. Why Choose the CXF-320/3001E Magnetically Levitated Molecular Pump? The CXF-320/3001E from KYKY is a cutting-edge magnetically levitated molecular pump designed for high-performance vacuum generation. Its 5-axis magnetic bearing system ensures fri onless operation, high reliability, and contamination-free vacuum. With a 3200 L/s pumping speed and ≤5×10⁻⁷ Pa ultimate vacuum, it excels in semiconductor manufacturing, chip production, industrial plating, and scientific research, particularly for handling corrosive and coagulable gases. Key Features of the CXF-320/3001E Magnetically Levitated Molecular Pump 1. Fri onless Operation 5-axis magnetic levitation eliminates mechanical contact, reducing wear and energy use. 2. Contamination-Free Vacuum Lubricant-free operation ensures clean high and ultrahigh vacuum environments. 3. Corrosive Gas Compatibility Treated chamber parts and inert gas protection enable long-term corrosive gas handling. 4. High Reliability and Longevity Precision ceramic ball bearings and carbon fiber composite rotor enhance durability. 5. Power Failure Protection Built-in power generation maintains operation during sudden outages. 6. Low Vibration Vibration levels below 0.05 mm ensure stability in sensitive applications. 7. Flexible Installation Mountable in any orientation for seamless system integration. 8. Advanced Motor Control High-efficiency DC motor with servo control ensures stable startup and speed compensation. 9. Temperature Regulation Electric heater and controller prevent gas solidification and maintain optimal temperature. 10. Maintenance-Free Design Fri onless operation and robust construction minimize maintenance and downtime. Applications of the CXF-320/3001E Magnetically Levitated Molecular Pump 1. Semi