VAvat · 高真空节流阀
VAvat O2113-11 高真空节流阀
其它写法: O211311
关键规格
型号O2113-11
品牌VAvat
接口 / 连接ISO-F · CF-F · ASA · JIS B
配件匹配 · 询价确认
太星有对应替代型号 — 性能相当,价格低得多 →
价格询盘 支持B2B批量
交期随报价确认产品描述
Downstream pressure control valve for thin film process applications, featuring unique linear control and stable process repeatability. The unique counter-rotating vane assembly provides linear control across the entire operating range of the valve. In the open position, the throttle vanes impose minimal restriction on the pumping path during critical pump-down operations. The counter-rotating vane design maintains a low-profile flange, further minimizing conductance losses and overall pump stack height. Electrically actuated to regulate flow in conjunction with the control system. Material: Stainless steel / aluminum alloy. Sealing: Rubber ring seal. Opening diameters: DN25~50, DN60~400.
技术参数
| 系列 | VAvat |
|---|---|
| 通径 | DN25~50 · DN60~400 |
| 主体材质 | Aluminum alloy (materials optional) |
| 驱动方式 | Electric |
| 法兰类型 | ISO-F · CF-F · ASA · JIS B |
| 密封方式 | Rubber O-ring seal |
| 漏率 | 1 × 10⁻⁹ mbar·L/s |
| 压力范围 | 1 × 10⁻⁸ mbar – 1.2 bar |
| 首次保养前循环次数 | 2,000,000 cycles |
| 工作温度 | Valve body ≤ 120 °C; drive components ≤ 50 °C |
| 开/关时间 | ≤ 1 s |
| 部件材质 | Valve body SUS304 / aluminum alloy; valve bonnet SUS304 / aluminum alloy; shaft SUS304/316L |
| 安装方向 | Any orientation |
| Max. differential pressure on valve plate | 1000 mbar (DN25) → 100 mbar (DN200) |
| Max. controllable conductance molecular flow | 22 L/s (DN25) → 15000 L/s (DN200) |
| Min. controllable conductance molecular flow | 0.15 L/s (DN25) → 2.8 L/s (DN200) |
| Position mode | 0.09 s (DN25) → 0.29 s (DN200) |
| 型号示例 | VAvat-O2113-11-DN25~50 · VAvat-O2113-31-DN60~400 |
太星有对应替代型号
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