VAvat O2113-11 高真空节流阀

关键规格

型号O2113-11

品牌VAvat

接口 / 连接ISO-F · CF-F · ASA · JIS B

配件匹配 · 询价确认

价格询盘 支持B2B批量

订货

对比

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产品描述

Downstream pressure control valve for thin film process applications, featuring unique linear control and stable process repeatability. The unique counter-rotating vane assembly provides linear control across the entire operating range of the valve. In the open position, the throttle vanes impose minimal restriction on the pumping path during critical pump-down operations. The counter-rotating vane design maintains a low-profile flange, further minimizing conductance losses and overall pump stack height. Electrically actuated to regulate flow in conjunction with the control system. Material: Stainless steel / aluminum alloy. Sealing: Rubber ring seal. Opening diameters: DN25~50, DN60~400.

技术参数

Series	VAvat
Opening diameter / bore	DN25~50 · DN60~400
Main material	Aluminum alloy (materials optional)
Driver	Electric
Flange type	ISO-F · CF-F · ASA · JIS B
Sealing method	Rubber O-ring seal
Leakage rate	1 × 10⁻⁹ mbar·L/s
Pressure range	1 × 10⁻⁸ mbar – 1.2 bar
Number of times before first maintenance	2,000,000 cycles
Operating temperature	Valve body ≤ 120 °C; drive components ≤ 50 °C
Opening / closing time	≤ 1 s
Component material	Valve body SUS304 / aluminum alloy; valve bonnet SUS304 / aluminum alloy; shaft SUS304/316L
Mounting position	Any orientation
Max. differential pressure on valve plate	1000 mbar (DN25) → 100 mbar (DN200)
Max. controllable conductance molecular flow	22 L/s (DN25) → 15000 L/s (DN200)
Min. controllable conductance molecular flow	0.15 L/s (DN25) → 2.8 L/s (DN200)
Position mode	0.09 s (DN25) → 0.29 s (DN200)
Example model numbers	VAvat-O2113-11-DN25~50 · VAvat-O2113-31-DN60~400