VAvat O2113-11 High Vacuum Throttle Valve
Key specifications
Description
Downstream pressure control valve for thin film process applications, featuring unique linear control and stable process repeatability. The unique counter-rotating vane assembly provides linear control across the entire operating range of the valve. In the open position, the throttle vanes impose minimal restriction on the pumping path during critical pump-down operations. The counter-rotating vane design maintains a low-profile flange, further minimizing conductance losses and overall pump stack height. Electrically actuated to regulate flow in conjunction with the control system. Material: Stainless steel / aluminum alloy. Sealing: Rubber ring seal. Opening diameters: DN25~50, DN60~400.
Technical data
| Series | VAvat |
|---|---|
| Opening diameter / bore | DN25~50 · DN60~400 |
| Main material | Aluminum alloy (materials optional) |
| Driver | Electric |
| Flange type | ISO-F · CF-F · ASA · JIS B |
| Sealing method | Rubber O-ring seal |
| Leakage rate | 1 × 10⁻⁹ mbar·L/s |
| Pressure range | 1 × 10⁻⁸ mbar – 1.2 bar |
| Number of times before first maintenance | 2,000,000 cycles |
| Operating temperature | Valve body ≤ 120 °C; drive components ≤ 50 °C |
| Opening / closing time | ≤ 1 s |
| Component material | Valve body SUS304 / aluminum alloy; valve bonnet SUS304 / aluminum alloy; shaft SUS304/316L |
| Mounting position | Any orientation |
| Max. differential pressure on valve plate | 1000 mbar (DN25) → 100 mbar (DN200) |
| Max. controllable conductance molecular flow | 22 L/s (DN25) → 15000 L/s (DN200) |
| Min. controllable conductance molecular flow | 0.15 L/s (DN25) → 2.8 L/s (DN200) |
| Position mode | 0.09 s (DN25) → 0.29 s (DN200) |
| Example model numbers | VAvat-O2113-11-DN25~50 · VAvat-O2113-31-DN60~400 |
FAQ
What flange or port does the O2113-11 use?
O2113-11 connections: Flange type ISO-F · CF-F · ASA · JIS B.
How do I get a price and lead time for the O2113-11?
Send the model and quantity through the quote form on this page, or email vacuum@xiamenbest.com. We reply with price and lead time within 24 hours, and ship worldwide from Xiamen, China.
Need a confirmed configuration?
Share your application, target vacuum and voltage. We will match the pump or part and return a formal quote.
We build an equivalent — same duty, far lower cost
Taixing is a vacuum equipment manufacturer with its own 20,000 m2 plant and sixteen years in the industry. We build Products to the same duty as this imported unit, at factory-direct cost. Send your process conditions (gas, pressure range, flow) and we will match a model and quote.
See Taixing models →Related Products
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