VAvat · High Vacuum Throttle Valve
VAvat O2113-11 High Vacuum Throttle Valve
Also written as: O211311
Key specifications
ModelO2113-11
BrandVAvat
Connection / interfaceISO-F · CF-F · ASA · JIS B
PART MATCHING · QUOTE REQUIRED
Taixing builds an equivalent — same duty, far lower cost →
Price on request B2B volume available
Lead time on quoteDescription
Downstream pressure control valve for thin film process applications, featuring unique linear control and stable process repeatability. The unique counter-rotating vane assembly provides linear control across the entire operating range of the valve. In the open position, the throttle vanes impose minimal restriction on the pumping path during critical pump-down operations. The counter-rotating vane design maintains a low-profile flange, further minimizing conductance losses and overall pump stack height. Electrically actuated to regulate flow in conjunction with the control system. Material: Stainless steel / aluminum alloy. Sealing: Rubber ring seal. Opening diameters: DN25~50, DN60~400.
Technical data
| Series | VAvat |
|---|---|
| Opening diameter / bore | DN25~50 · DN60~400 |
| Main material | Aluminum alloy (materials optional) |
| Driver | Electric |
| Flange type | ISO-F · CF-F · ASA · JIS B |
| Sealing method | Rubber O-ring seal |
| Leakage rate | 1 × 10⁻⁹ mbar·L/s |
| Pressure range | 1 × 10⁻⁸ mbar – 1.2 bar |
| Number of times before first maintenance | 2,000,000 cycles |
| Operating temperature | Valve body ≤ 120 °C; drive components ≤ 50 °C |
| Opening / closing time | ≤ 1 s |
| Component material | Valve body SUS304 / aluminum alloy; valve bonnet SUS304 / aluminum alloy; shaft SUS304/316L |
| Mounting position | Any orientation |
| Max. differential pressure on valve plate | 1000 mbar (DN25) → 100 mbar (DN200) |
| Max. controllable conductance molecular flow | 22 L/s (DN25) → 15000 L/s (DN200) |
| Min. controllable conductance molecular flow | 0.15 L/s (DN25) → 2.8 L/s (DN200) |
| Position mode | 0.09 s (DN25) → 0.29 s (DN200) |
| Example model numbers | VAvat-O2113-11-DN25~50 · VAvat-O2113-31-DN60~400 |
TAIXING EQUIVALENT AVAILABLE
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