VAvat · 高真空门阀
VAvat G1113-61 高真空门阀
其它写法: G111361
关键规格
型号G1113-61
品牌VAvat
配件匹配 · 询价确认
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交期随报价确认产品描述
Isolation of the load-lock chambers on the atmospheric side in 200 mm, 300 mm and 450 mm wafer semiconductor manufacturing systems. Easy to disassemble and maintain, cost-effective, with a unique cylinder design. Material: Aviation aluminum alloy. Sealing: Sealed with rubber O-rings. Opening diameters: DN500×100, DN800×130.
技术参数
| 系列 | VAvat |
|---|---|
| 通径 | DN500×100 · DN800×130 |
| 主体材质 | Aluminum alloy / stainless steel |
| 驱动方式 | Pneumatic, double-acting |
| 密封方式 | Sealed with rubber O-rings |
| 外形尺寸 | Customizable according to customer requirements |
| 定制 | All specifications and models can be customized, including water-cooled and temperature-controlled modules |
| 型号示例 | VAvat-G1113-61-DN500×100 · VAvat-G1113-62-DN800×130 |
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