工业设备
VAvat · 高真空门阀
VAvat G1113-61 高真空门阀
关键规格
型号G1113-61
品牌VAvat
配件匹配 · 询价确认
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产品描述
Isolation of the load-lock chambers on the atmospheric side in 200 mm, 300 mm and 450 mm wafer semiconductor manufacturing systems. Easy to disassemble and maintain, cost-effective, with a unique cylinder design. Material: Aviation aluminum alloy. Sealing: Sealed with rubber O-rings. Opening diameters: DN500×100, DN800×130.
技术参数
| Series | VAvat |
|---|---|
| Opening diameter / bore | DN500×100 · DN800×130 |
| Main material | Aluminum alloy / stainless steel |
| Driver | Pneumatic, double-acting |
| Sealing method | Sealed with rubber O-rings |
| Product dimensions | Customizable according to customer requirements |
| Customization | All specifications and models can be customized, including water-cooled and temperature-controlled modules |
| Example model numbers | VAvat-G1113-61-DN500×100 · VAvat-G1113-62-DN800×130 |
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