VAvat · High Vacuum Door Valve
VAvat G1113-61 High Vacuum Door Valve
Also written as: G111361
Key specifications
ModelG1113-61
BrandVAvat
PART MATCHING · QUOTE REQUIRED
Taixing builds an equivalent — same duty, far lower cost →
Price on request B2B volume available
Lead time on quoteDescription
Isolation of the load-lock chambers on the atmospheric side in 200 mm, 300 mm and 450 mm wafer semiconductor manufacturing systems. Easy to disassemble and maintain, cost-effective, with a unique cylinder design. Material: Aviation aluminum alloy. Sealing: Sealed with rubber O-rings. Opening diameters: DN500×100, DN800×130.
Technical data
| Series | VAvat |
|---|---|
| Opening diameter / bore | DN500×100 · DN800×130 |
| Main material | Aluminum alloy / stainless steel |
| Driver | Pneumatic, double-acting |
| Sealing method | Sealed with rubber O-rings |
| Product dimensions | Customizable according to customer requirements |
| Customization | All specifications and models can be customized, including water-cooled and temperature-controlled modules |
| Example model numbers | VAvat-G1113-61-DN500×100 · VAvat-G1113-62-DN800×130 |
TAIXING EQUIVALENT AVAILABLE
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