Mibay · TXFB 300Y Integrated Turbomolecular Vacuum Pump 300 Ls High Vacuum Solution
Mibay TXFB 300Y Integrated Turbomolecular Vacuum Pump 300 Ls High 涡轮分子泵
关键规格
型号TXFB
品牌Mibay
抽速300 L/s
极限真空3×10⁻⁷ Pa / 6×10⁻⁷ Pa
接口 / 连接CF100 / ISO-K100
配件匹配 · 询价确认
价格询盘 支持B2B批量
交期随报价确认产品描述
The TXFB-300Y is a flagship integrated turbomolecular vacuum pump designed for high-cleanliness, medium-to-large vacuum applications. Featuring a 300 L/s pumping speed, 33,000 RPM high-speed rotation, and a maintenance-free ceramic bearing design, it provides a compact, energy-efficient, and reliable solution for semiconductor manufacturing, PVD coating, and advanced scientific research.
技术参数
| Parameter Item | TXFB-300Y Details |
|---|---|
| 进气法兰 | CF100 / ISO-K100 |
| Exhaust Flange | KF25 |
| 抽速 (N₂) | 300 L/s |
| 压缩比 (N₂) | ＞1×10⁸ |
| 压缩比 (H₂) | ＞1×10³ |
| 极限压力 | 3×10⁻⁷ Pa / 6×10⁻⁷ Pa |
| 电机转速 | 33,000 rpm |
| Bearing Type | Grease-lubricated Ceramic Bearings |
| Vibration Value | ≤0.1μm |
| Start-up Time | ＜4 min |
| Recommended Backing Pump | 2 L/s |
| 冷却方式 | Water Cooling / Air Cooling |
| 安装方向 | Any Angle |
| Pump Weight | ≈12 Kg |
| Input Voltage Range | 24 VDC |
| Rated / Peak Power | 200 W / 300 W (10s) |
| Control Interface | RS485 |
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