Mibay · TXFB 300Y Integrated Turbomolecular Vacuum Pump 300 Ls High Vacuum Solution
Mibay TXFB 300Y Integrated Turbomolecular Vacuum Pump 300 Ls High
Key specifications
ModelTXFB
BrandMibay
Pumping speed300 L/s
Ultimate vacuum3×10⁻⁷ Pa / 6×10⁻⁷ Pa
Connection / interfaceCF100 / ISO-K100
PART MATCHING · QUOTE REQUIRED
Price on request B2B volume available
Lead time on quoteDescription
The TXFB-300Y is a flagship integrated turbomolecular vacuum pump designed for high-cleanliness, medium-to-large vacuum applications. Featuring a 300 L/s pumping speed, 33,000 RPM high-speed rotation, and a maintenance-free ceramic bearing design, it provides a compact, energy-efficient, and reliable solution for semiconductor manufacturing, PVD coating, and advanced scientific research.
Technical data
| Parameter Item | TXFB-300Y Details |
|---|---|
| Inlet Flange | CF100 / ISO-K100 |
| Exhaust Flange | KF25 |
| Pumping Speed (N₂) | 300 L/s (635.7 CFM) |
| Compression Ratio (N₂) | >1×10⁸ |
| Compression Ratio (H₂) | >1×10³ |
| Ultimate Pressure | 3×10⁻⁷ Pa / 6×10⁻⁷ Pa |
| Motor Speed | 33,000 rpm |
| Bearing Type | Grease-lubricated Ceramic Bearings |
| Vibration Value | ≤0.1μm |
| Start-up Time | <4 min |
| Recommended Backing Pump | 2 L/s (4.2 CFM) |
| Cooling Method | Water Cooling / Air Cooling |
| Installation Direction | Any Angle |
| Pump Weight | ≈12 Kg |
| Input Voltage Range | 24 VDC |
| Rated / Peak Power | 200 W / 300 W (10s) |
| Control Interface | RS485 |
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