Mibay ECM Series Cryopump for Semico 低温真空泵

产品描述

## ECM Series Cryopump for Semiconductor Manufacturing and Ion Implantation The ECM Series Cryopump is a high-intelligence vacuum solution engineered for semiconductor IC manufacturing and ion implantation. Featuring automatic regeneration, PLC remote integration, and adaptive thermal compensation, it ensures ultra-clean, stable, and efficient vacuum performance for advanced 7nm-node processes and beyond. Inquire Now Product categories - Dry vacuum pump dry scroll pumps - Dry screw Pumps - Roots pumps - Claw vacuum pump - screw vacuum pump - Oil Vacuum pump Two stage Rotary Vane Pumps - Single-stage Rotary Vane Pumps - Oil-Free Scroll Vacuum Pump - Oil diffusion pump - Helium Leak Detector helium mass spectrometer leak detector - Leak detector accessories - Leak Detector Repair Parts - Mass spectrometer - Vacuum Leak Detection Equipment - Vacuum Gauge - Vacuum Pump System Turbo Molecular Vacuum Pump - Custom Vacuum Systems - Vacuum pump Oil - Vacuum Accessories compatible part molecular pump non-standard maintenance parts - Vacuum pump maintenance and repair accessories - Vacuum Value - Other Equipments how can we help you You can contact us any way that is convenient for you. We are available 24/7 via email or telephone. Contact Us New Products - SX Liquid Ring Monoblock Vacuum Compressors for Industrial Applications Read More - Semi-automatic Leak Detection Box TLDB-085 for High-Precision Chip Packaging and Vacuum Systems Read More - TPR500 5LED Digital Display Pirani Vacuum Gauge for Precision Low Vacuum Monitoring Read More - CFV 106 Pyrani/Cold Cathode Composite Vacuum Gauge for Wide-Range Vacuum Measurement Read More - RCP230N Handheld Pirani Vacuum Gauge for Mobile Vacuum Measurement Read More - PVG 550 Membrane Resistor High-Precision Composite Vacuum Gauge for Vacuum Systems Read More - PRG-500 Digital Pirani Vacuum Gauge for Precise Medium and Low Vacuum Measurement Read More - RBP series resistance vacuum pressure transmission RBP-101 Read More - Product Details The ECM Series Semiconductor Specialized Cryopump is a high-performance, intelligent vacuum solution specifically engineered by Taixing for semiconductor integrated circuits and ion implantation applications. As a core component for semiconductor vacuum equipment, it features rapid automatic regeneration and remote monitoring capabilities, ensuring a high-cleanliness and high-reliability environment for critical vacuum processes. Core Features - Internal Heating & Auto-Regeneration: Built-in heating system supports one-touch automatic regeneration, eliminating manual intervention and significantly improving equipment utilization. - External Nitrogen Purge: Equipped with an external nitrogen inlet for safe purging during maintenance, preventing impurity contamination and oxidation risks. - Waste Gas Safety Valve: Integrated safety valve compatible with waste gas treatment systems, meeting semiconductor industry environmental and safety standards. - Adaptive Thermal Compensation: Features "Adaptive" logic to dynamically compensate for cryogenic heat loads, ensuring stable and reliable pumping performance under varying conditions. - PLC Remote Operation: Supports industrial PLC integration for remote start/stop, parameter adjustment, and status monitoring, ideal for automated production lines. - Full Parameter Automation: Precise control over temperature, regeneration cycles, roughing, and heating processes for meticulous process management. - High-Cleanliness Design: All-stainless steel body and oil-free operation meet the stringent requirements of high-performance vacuum solutions . - Flexible Installation: Supports vertical or elbow mounting configurations to adapt to different chamber interfaces and space constraints. Technical Specifications Parameter | ECM Series Specifications Inlet Flange | VG200 / CF16 / CF25 (Customizable) Pumping Speed (Air) | Standardized for High-Flow Semiconductor Needs Regeneration Mode | Fully Automatic (Internal Heat