Mibay · ECM Series Cryopump for Semiconductor Manufacturing and Ion Implantation
Mibay ECM Series Cryopump for Semico nductor Manufacturing and Ion Implantation
关键规格
型号ECM Series Cryopump for Semico
品牌Mibay
抽速Standardized for High-Flow Semiconductor Needs
接口 / 连接VG200 / CF16 / CF25 (Customizable)
配件匹配 · 询价确认
价格询盘 支持B2B批量
交期随报价确认产品描述
The ECM Series Cryopump is a high-intelligence vacuum solution engineered for semiconductor IC manufacturing and ion implantation. Featuring automatic regeneration, PLC remote integration, and adaptive thermal compensation, it ensures ultra-clean, stable, and efficient vacuum performance for advanced 7nm-node processes and beyond.
技术参数
| 参数 | ECM Series Specifications |
|---|---|
| 进气法兰 | VG200 / CF16 / CF25 (Customizable) |
| 抽速 (Air) | Standardized for High-Flow Semiconductor Needs |
| Regeneration Mode | Fully Automatic (Internal Heating + N2 Purge) |
| Control Interface | Industrial PLC / RS485 |
| 材质 | High-Grade Stainless Steel (Ultra-Clean) |
| Thermal Compensation | Intelligent Adaptive Logic |
| Safety Features | Over-pressure Safety Valve & Waste Gas Port |
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