Mibay · CRYO-P Series High Vacuum Cryogenic Pumps for Semiconductor and Coating
Mibay CRYO-P Series High Vacuum Cryo genic Pumps for Semiconductor and Coating
关键规格
型号CRYO-P Series High Vacuum Cryo
品牌Mibay
抽速N₂ | 1,700 | 2,400 | 4,000 | 5,000 | 10,000 | 17,000 | 21,000 | 28,000
极限真空10⁻⁷ | 10⁻⁷ | 10⁻⁷ | 10⁻⁷ | 10⁻⁷ | 10⁻⁷ | 10⁻⁷ | 10⁻⁷
配件匹配 · 询价确认
价格询盘 支持B2B批量
交期随报价确认产品描述
The CRYO-P series cryogenic pump is a high-performance, oil-free vacuum solution utilizing cryogenic condensation and adsorption. Achieving ultimate vacuum levels of 10⁻⁷ Pa (up to 10⁻⁹ Pa with bake-out), it is designed for demanding applications in semiconductor fabrication, thin-film coating, and space simulation. Featuring flexible installation, low operating costs, and customizable corrosion-resistant or bakeable configurations, the CRYO-P series provides reliable, clean, and efficient vacuum performance for advanced industrial and scientific environments.
技术参数
| 抽速 (L/s) | N₂ | 1,700 | 2,400 | 4,000 | 5,000 | 10,000 | 17,000 | 21,000 | 28,000 |
|---|---|
| H₂ | 1.0×10⁶ | 1.2×10⁶ | 1.0×10⁶ | 2.4×10⁶ | 4.6×10⁶ | 8.5×10⁶ | 6.0×10⁶ | 1.5×10⁶ |
| Ar | 1,400 | 2,000 | 3,300 | 4,200 | 8,400 | 14,000 | 19,000 | 23,000 |
| H₂O | 4,000 | 6,900 | 9,500 | 16,000 | 29,000 | 39,000 | 57,000 | 70,000 |
| Max Throughput (Pa·L/s) | Ar | 1.2×10³ | 1.2×10³ | 2.0×10³ | 1.6×10³ | 1.7×10³ | 4.1×10³ | 1.7×10³ | 2.7×10³ |
| 处理量 (Pa·L) | Ar | 1.0×10⁸ | 1.0×10⁸ | 2.1×10⁸ | 4.3×10⁸ | 5.8×10⁸ | 8.1×10⁸ | 5.8×10⁸ | 7.8×10⁸ |
| 极限压力 (Pa) | 10⁻⁷ | 10⁻⁷ | 10⁻⁷ | 10⁻⁷ | 10⁻⁷ | 10⁻⁷ | 10⁻⁷ | 10⁻⁷ |
| He Fill Pressure (MPa) | 1.3±0.05 | 1.3±0.05 | 1.45±0.05 | 1.45±0.05 | 1.45±0.05 | 1.45±0.05 | 1.45±0.05 | 1.45±0.05 |
| Cool-down Time (min) | 100 | 112 | 100 | 120 | 160 | 165 | 180 | 240 |
相关产品
更多来自 低温泵
