Mibay CRYO-P Series High Vacuum Cryo 低温真空泵
关键规格
产品描述
## CRYO-P Series High Vacuum Cryogenic Pumps for Semiconductor and Coating The CRYO-P series cryogenic pump is a high-performance, oil-free vacuum solution utilizing cryogenic condensation and adsorption. Achieving ultimate vacuum levels of 10⁻⁷ Pa (up to 10⁻⁹ Pa with bake-out), it is designed for demanding applications in semiconductor fabrication, thin-film coating, and space simulation. Featuring flexible installation, low operating costs, and customizable corrosion-resistant or bakeable configurations, the CRYO-P series provides reliable, clean, and efficient vacuum performance for advanced industrial and scientific environments. Inquire Now Product categories - Dry vacuum pump dry scroll pumps - Dry screw Pumps - Roots pumps - Claw vacuum pump - screw vacuum pump - Oil Vacuum pump Two stage Rotary Vane Pumps - Single-stage Rotary Vane Pumps - Oil-Free Scroll Vacuum Pump - Oil diffusion pump - Helium Leak Detector helium mass spectrometer leak detector - Leak detector accessories - Leak Detector Repair Parts - Mass spectrometer - Vacuum Leak Detection Equipment - Vacuum Gauge - Vacuum Pump System Turbo Molecular Vacuum Pump - Custom Vacuum Systems - Vacuum pump Oil - Vacuum Accessories compatible part molecular pump non-standard maintenance parts - Vacuum pump maintenance and repair accessories - Vacuum Value - Other Equipments how can we help you You can contact us any way that is convenient for you. We are available 24/7 via email or telephone. Contact Us New Products - SX Liquid Ring Monoblock Vacuum Compressors for Industrial Applications Read More - Semi-automatic Leak Detection Box TLDB-085 for High-Precision Chip Packaging and Vacuum Systems Read More - TPR500 5LED Digital Display Pirani Vacuum Gauge for Precision Low Vacuum Monitoring Read More - CFV 106 Pyrani/Cold Cathode Composite Vacuum Gauge for Wide-Range Vacuum Measurement Read More - RCP230N Handheld Pirani Vacuum Gauge for Mobile Vacuum Measurement Read More - PVG 550 Membrane Resistor High-Precision Composite Vacuum Gauge for Vacuum Systems Read More - PRG-500 Digital Pirani Vacuum Gauge for Precise Medium and Low Vacuum Measurement Read More - RBP series resistance vacuum pressure transmission RBP-101 Read More - Product Details The high-performance CRYO-P Series Cryopump is a cluster-type vacuum equipment that operates on the principles of cryogenic condensation and adsorption. As a premier choice for obtaining oil-free high vacuum environments, this series can achieve an ultimate vacuum of 10⁻⁷ Pa. It is widely utilized in high-performance vacuum solutions for semiconductor manufacturing, vacuum coating, space simulation, and other high-end vacuum fields, making it the core equipment for ultra-clean and extreme vacuum scenarios. ## Core Features - Oil-Free & Contamination-Free: By utilizing cryogenic condensation and adsorption, it eliminates oil pollution, ensuring an ultra-clean vacuum environment reaching 10⁻⁷ Pa. - Extreme Vacuum Capability: Capable of reaching ultimate pressures beyond 10⁻⁷ Pa, meeting the rigorous demands of high-end scientific research and industrial production. - Low Operating Costs: No liquid helium is required; it only needs conventional cooling media, significantly reducing long-term operation and maintenance expenses. - Flexible Installation: Simple to operate and can be installed in any orientation to suit various vacuum system layouts. - Safe & Reliable: Features a fully sealed design with zero leakage risk, offering a long service life and convenient safety protocols. - Customizable Adaptation: Supports "Bakeable" versions (high-temperature baking of the outer shell to reach 10⁻⁹ Pa) and "Corrosion-Resistant" versions (special internal coatings) for harsh working conditions. - Wide Pumping Speed Range: Nitrogen pumping speeds range from 1,700 to 28,000 L/s, and Hydrogen speeds from 2,700 to 43,000 L/s. - High Cooling Efficiency: Cooling down time at 50Hz ranges from 90 to 240 minutes, allowing the system to re
技术参数
| Pumping Speed (L/s) | N₂ | 1,700 | 2,400 | 4,000 | 5,000 | 10,000 | 17,000 | 21,000 | 28,000 |
|---|---|
| H₂ | 1.0×10⁶ | 1.2×10⁶ | 1.0×10⁶ | 2.4×10⁶ | 4.6×10⁶ | 8.5×10⁶ | 6.0×10⁶ | 1.5×10⁶ |
| Ar | 1,400 | 2,000 | 3,300 | 4,200 | 8,400 | 14,000 | 19,000 | 23,000 |
| H₂O | 4,000 | 6,900 | 9,500 | 16,000 | 29,000 | 39,000 | 57,000 | 70,000 |
| Max Throughput (Pa·L/s) | Ar | 1.2×10³ | 1.2×10³ | 2.0×10³ | 1.6×10³ | 1.7×10³ | 4.1×10³ | 1.7×10³ | 2.7×10³ |
| Capacity (Pa·L) | Ar | 1.0×10⁸ | 1.0×10⁸ | 2.1×10⁸ | 4.3×10⁸ | 5.8×10⁸ | 8.1×10⁸ | 5.8×10⁸ | 7.8×10⁸ |
| Ultimate Pressure (Pa) | 10⁻⁷ | 10⁻⁷ | 10⁻⁷ | 10⁻⁷ | 10⁻⁷ | 10⁻⁷ | 10⁻⁷ | 10⁻⁷ |
| He Fill Pressure (MPa) | 1.3±0.05 | 1.3±0.05 | 1.45±0.05 | 1.45±0.05 | 1.45±0.05 | 1.45±0.05 | 1.45±0.05 | 1.45±0.05 |
| Cool-down Time (min) | 100 | 112 | 100 | 120 | 160 | 165 | 180 | 240 |
常见问题
CRYO-P Series High Vacuum Cryo 的抽速是多少?
CRYO-P Series High Vacuum Cryo 的抽速:Pumping Speed (L/s) N₂ | 1,700 | 2,400 | 4,000 | 5,000 | 10,000 | 17,000 | 21,000 | 28,000。
CRYO-P Series High Vacuum Cryo 的极限压力是多少?
CRYO-P Series High Vacuum Cryo 的极限压力:Ultimate Pressure (Pa) 10⁻⁷ | 10⁻⁷ | 10⁻⁷ | 10⁻⁷ | 10⁻⁷ | 10⁻⁷ | 10⁻⁷ | 10⁻⁷。
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