Mibay · ECM Series Cryopump for Semiconductor Manufacturing and Ion Implantation

Mibay ECM Series Cryopump for Semico nductor Manufacturing and Ion Implantation

Name: Mibay ECM Series Cryopump for Semico nductor Manufacturing and Ion Implantation
Brand: Mibay
SKU: mb-ecm-series-cryopump-for-semiconductor-manufacturing-and-ion-implantation

Key specifications

ModelECM Series Cryopump for Semico

BrandMibay

Pumping speedStandardized for High-Flow Semiconductor Needs

Connection / interfaceVG200 / CF16 / CF25 (Customizable)

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Description

The ECM Series Cryopump is a high-intelligence vacuum solution engineered for semiconductor IC manufacturing and ion implantation. Featuring automatic regeneration, PLC remote integration, and adaptive thermal compensation, it ensures ultra-clean, stable, and efficient vacuum performance for advanced 7nm-node processes and beyond.

Technical data

Parameter	ECM Series Specifications
Inlet Flange	VG200 / CF16 / CF25 (Customizable)
Pumping Speed (Air)	Standardized for High-Flow Semiconductor Needs
Regeneration Mode	Fully Automatic (Internal Heating + N2 Purge)
Control Interface	Industrial PLC / RS485
Material	High-Grade Stainless Steel (Ultra-Clean)
Thermal Compensation	Intelligent Adaptive Logic
Safety Features	Over-pressure Safety Valve & Waste Gas Port