VAvat Q1113-21 High Vacuum Quick Protection Valve
Key specifications
Description
Mainly used in semiconductor processes and applications requiring high vacuum levels, as well as in chip and memory manufacturing. Since equipment must operate continuously and stably within a specified high-vacuum system for long periods, and particles and contaminants in the vacuum system must not be affected by any factors, a valve is required that can cut off extremely quickly to protect the high-vacuum system in the event of random failures of equipment components. When the design or machinery malfunctions and requires an emergency shutdown, a fast-response valve can cut off the air flow within an extremely short time, thereby preventing gas leakage or environmental pollution, and protecting the system and equipment from damage. Especially in environments involving toxic gases, it safeguards the health and safety of operators and equipment spaces. Material: Aluminum alloy / stainless steel. Sealing: Rubber O-ring seal. Opening diameters: DN60~320.
Technical data
| Series | VAvat |
|---|---|
| Opening diameter / bore | DN60~320 |
| Main material | Aluminum alloy |
| Driver | Fast pneumatic (double-acting / with solenoid valve) |
| Flange type | ISO-F · CF-F · ASA · JIS B · ISO-K |
| Sealing method | Rubber O-ring seal |
| Actuator | Fast pneumatic |
| Example model numbers | VAvat-Q1113-21-DN60~320 (pneumatic double-acting) · VAvat-Q1113-21024-DN60~320 (pneumatic with solenoid valve) |
FAQ
What flange or port does the Q1113-21 use?
Q1113-21 connections: Flange type ISO-F · CF-F · ASA · JIS B · ISO-K.
How do I get a price and lead time for the Q1113-21?
Send the model and quantity through the quote form on this page, or email vacuum@xiamenbest.com. We reply with price and lead time within 24 hours, and ship worldwide from Xiamen, China.
Need a confirmed configuration?
Share your application, target vacuum and voltage. We will match the pump or part and return a formal quote.
We build an equivalent — same duty, far lower cost
Taixing is a vacuum equipment manufacturer with its own 20,000 m2 plant and sixteen years in the industry. We build Products to the same duty as this imported unit, at factory-direct cost. Send your process conditions (gas, pressure range, flow) and we will match a model and quote.
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