VAvat Q1113-21 Высоковакуумный быстродействующий защитный клапан

Описание

Mainly used in semiconductor processes and applications requiring high vacuum levels, as well as in chip and memory manufacturing. Since equipment must operate continuously and stably within a specified high-vacuum system for long periods, and particles and contaminants in the vacuum system must not be affected by any factors, a valve is required that can cut off extremely quickly to protect the high-vacuum system in the event of random failures of equipment components. When the design or machinery malfunctions and requires an emergency shutdown, a fast-response valve can cut off the air flow within an extremely short time, thereby preventing gas leakage or environmental pollution, and protecting the system and equipment from damage. Especially in environments involving toxic gases, it safeguards the health and safety of operators and equipment spaces. Material: Aluminum alloy / stainless steel. Sealing: Rubber O-ring seal. Opening diameters: DN60~320.