
Mibay · Y-Type High Vacuum Exhaust Unit for Clean and High-Performance Vacuum Systems
Mibay Y-Type High Vacuum Exhaust Uni t for Clean and High-Performance Vacuum Systems
Key specifications
ModelY-Type High Vacuum Exhaust Uni
BrandMibay
Pumping speed4.3-6 m³/h
Ultimate vacuum≤3×10⁻⁵ Pa
PART MATCHING · QUOTE REQUIRED
Price on request B2B volume available
Lead time on quoteDescription
The Y-Type High Vacuum Exhaust Unit delivers an ultimate vacuum of 3×10⁻⁵ Pa with flexible oil-free scroll or oil-lubricated rotary vane pump options. Ideal for cleanroom applications in semiconductor, aerospace, and scientific research.
Technical data
| Specification | Value |
|---|---|
| Product Type | High Vacuum Exhaust Unit |
| Molecular Pump | JTFB-600F, 600 L/s (N₂) |
| Ultimate Vacuum | ≤3×10⁻⁵ Pa |
| Forepump Options | 4.3 L/s oil-free scroll pump or 3-6 L/s rotary vane pump |
| Pumping Speed (Forepump) | 4.3-6 m³/h |
| Vacuum Gauge | KF40 ionization + KF16 thermocouple, 1×10⁵ to 1×10⁻⁵ Pa |
| Test Hood Dimensions | Ø180 mm × 138 mm |
| Leak Rate | ≤1×10⁻³ Pa/h |
| Startup Performance | Vacuum better than 3×10⁻³ Pa at 400 Hz |
| System Weight | ≈120 kg |
| Mobile Platform | Wheeled cart, ≥150 kg capacity |
| Vacuum Components | KF40 manual angle valve, DN40 stainless steel bellows (500 mm) |




