
Mibay Y-Type High Vacuum Exhaust Uni High Vacuum Pumping Unit
Key specifications
Description
## Y-Type High Vacuum Exhaust Unit for Clean and High-Performance Vacuum Systems The Y-Type High Vacuum Exhaust Unit delivers an ultimate vacuum of 3×10⁻⁵ Pa with flexible oil-free scroll or oil-lubricated rotary vane pump options. Ideal for cleanroom applications in semiconductor, aerospace, and scientific research. Inquire Now Product categories - Dry vacuum pump dry scroll pumps - Dry screw Pumps - Roots pumps - Claw vacuum pump - screw vacuum pump - Oil Vacuum pump Two stage Rotary Vane Pumps - Single-stage Rotary Vane Pumps - Oil-Free Scroll Vacuum Pump - Oil diffusion pump - Helium Leak Detector helium mass spectrometer leak detector - Leak detector accessories - Leak Detector Repair Parts - Mass spectrometer - Vacuum Leak Detection Equipment - Vacuum Gauge - Vacuum Pump System Turbo Molecular Vacuum Pump - Custom Vacuum Systems - Vacuum pump Oil - Vacuum Accessories compatible part molecular pump non-standard maintenance parts - Vacuum pump maintenance and repair accessories - Vacuum Value - Other Equipments how can we help you You can contact us any way that is convenient for you. We are available 24/7 via email or telephone. Contact Us New Products - SX Liquid Ring Monoblock Vacuum Compressors for Industrial Applications Read More - Semi-automatic Leak Detection Box TLDB-085 for High-Precision Chip Packaging and Vacuum Systems Read More - TPR500 5LED Digital Display Pirani Vacuum Gauge for Precision Low Vacuum Monitoring Read More - CFV 106 Pyrani/Cold Cathode Composite Vacuum Gauge for Wide-Range Vacuum Measurement Read More - RCP230N Handheld Pirani Vacuum Gauge for Mobile Vacuum Measurement Read More - PVG 550 Membrane Resistor High-Precision Composite Vacuum Gauge for Vacuum Systems Read More - PRG-500 Digital Pirani Vacuum Gauge for Precise Medium and Low Vacuum Measurement Read More - RBP series resistance vacuum pressure transmission RBP-101 Read More - Product Details ## Why Choose the Y-Type High Vacuum Exhaust Unit ? The Y-Type High Vacuum Exhaust Unit is designed for precision and flexibility in clean vacuum applications. Featuring a JTFB-600F composite molecular pump with a 600 L/s pumping speed and an ultimate vacuum of 3×10⁻⁵ Pa, it ensures high-performance vacuum conditions. The unit offers two forepump options—oil-free scroll or oil-lubricated rotary vane—to cater to both high-cleanliness and cost-effective needs. Its integrated vacuum monitoring system and mobile platform make it a versatile solution for industries such as semiconductor manufacturing, aerospace, and scientific research. ## Key Features of the Y-Type High Vacuum Exhaust Unit - High-Performance Molecular Pump: JTFB-600F composite molecular pump delivers a 600 L/s pumping speed and an ultimate vacuum of 3×10⁻⁵ Pa for superior vacuum performance. - Flexible Forepump Configurations: Choose between a 4.3 L/s oil-free scroll pump for cleanroom applications or a 3-6 L/s rotary vane pump for cost-effective operation. - Precision Vacuum Monitoring: Equipped with a high-vacuum composite gauge (KF40 ionization gauge + KF16 couple gauge) covering a range of 1×10⁵ to 1×10⁻⁵ Pa. - Mobile Design: Mounted on a wheeled cart with a stainless steel frame, capable of supporting ≥150 kg for easy mobility. - Robust Vacuum Components: Includes a DN40 stainless steel bellows (500 mm) and a KF40 manual angle valve for reliable high-vacuum sealing. - Compact Test Chamber: Features a Ø180 mm × 138 mm test hood for precise vacuum testing. - Rapid Startup Performance: Achieves a vacuum of better than 3×10⁻³ Pa at 400 Hz, ensuring quick setup. - Low Leak Rate: System leak rate ≤1×10⁻³ Pa/h for consistent performance. ## Applications of the Y-Type High Vacuum Exhaust Unit - Semiconductor Manufacturing: Ensures ultra-clean vacuum conditions for wafer fabrication and other high-precision processes. - Aerospace Industry: Supports vacuum testing for satellite components, propulsion systems, and sealed assemblies. - Scientific Research: Provides reliable
Technical data
| Specification | Value |
|---|---|
| Product Type | High Vacuum Exhaust Unit |
| Molecular Pump | JTFB-600F, 600 L/s (N₂) |
| Ultimate Vacuum | ≤3×10⁻⁵ Pa |
| Forepump Options | 4.3 L/s oil-free scroll pump or 3-6 L/s rotary vane pump |
| Pumping Speed (Forepump) | 4.3-6 m³/h |
| Vacuum Gauge | KF40 ionization + KF16 thermocouple, 1×10⁵ to 1×10⁻⁵ Pa |
| Test Hood Dimensions | Ø180 mm × 138 mm |
| Leak Rate | ≤1×10⁻³ Pa/h |
| Startup Performance | Vacuum better than 3×10⁻³ Pa at 400 Hz |
| System Weight | ≈120 kg |
| Mobile Platform | Wheeled cart, ≥150 kg capacity |
| Vacuum Components | KF40 manual angle valve, DN40 stainless steel bellows (500 mm) |
FAQ
What is the pumping speed of the Y-Type High Vacuum Exhaust Uni?
Y-Type High Vacuum Exhaust Uni pumping speed: Pumping Speed (Forepump) 4.3-6 m³/h.
What ultimate pressure does the Y-Type High Vacuum Exhaust Uni reach?
Y-Type High Vacuum Exhaust Uni ultimate pressure: Ultimate Vacuum ≤3×10⁻⁵ Pa.
How big and heavy is the Y-Type High Vacuum Exhaust Uni?
Y-Type High Vacuum Exhaust Uni: Test Hood Dimensions Ø180 mm × 138 mm · System Weight ≈120 kg.
How do I get a price and lead time for the Y-Type High Vacuum Exhaust Uni?
Send the model and quantity through the quote form on this page, or email vacuum@xiamenbest.com. We reply with price and lead time within 24 hours, and ship worldwide from Xiamen, China.
Need a confirmed configuration?
Share your application, target vacuum and voltage. We will match the pump or part and return a formal quote.




